전자 가스(Electric Gases) 시장 2022년 : 벌크 및 특수 가스 – Techcet

출판 : Techcet   출판년월 : 2022년06월

Electric Gases: Bulk & Specialty Gases

반도체 제조에 사용되는 재료 가스 시장을 조사하여 시장 전망, 시장 동향, 공급망 정보 등을 게재하고 있습니다。

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Techcet의 시장조사보고서「전자 가스 시장조사 2022년 : 벌크 및 특수 가스 – Electric Gases: Bulk & Specialty Gases」는 반도체 제조에 사용되는 재료 가스 시장을 조사하여 시장 전망, 시장 동향, 공급망 정보 등을 게재하고 있습니다。

주요 게시물

  1. 이그제큐티브 요약
  2. 조사 범위, 목적, 방법론
  3. 반도체 산업의 시장 상황과 전망
    1. 세계 경제
    2. 전자 제품 시장
    3. 반도체 제조 성장 및 확장
    4. 정책 및 무역 추세 및 영향
    5. 반도체 재료 전망
  4. 전자가스 시장 동향
    1. 전자 가스 사업을 촉진하는 시장 동향
    2. 공급 능력과 수요, 투자
    3. 기술의 촉진요인/재료 변화 및 변천
    4. 미국의 특수 가스 및 분류
    5. EHS와 물류 문제 – 텅스텐
    6. 사양 및 순도에 대한 일반적인 견해
    7. 시장 동향 평가
  5. 시장 통계 및 예측
    1. 전자 가스 시장: 실적 및 5년 예측
    2. 특수 가스 시장: 5년간의 수요 및 공급
    3. M&A
    4. 신규 공장
    5. 공급업체 공장 폐쇄
    6. 신규 진입 기업
    7. 가격 동향
    8. 성막 방법별 가공 지그
    9. 시장 변천
    10. 가스 공급 평가
  6. 서브티어 소재 공급망
    1. 판매 채널
    2. 물류 요건
    3. 서브티어 공급망 M&A
    4. 서브티어 공급망의 EHS 및 물류 문제
    5. 서브티어 공급망 가격 동향
    6. 텍셋 분석가를 통한 하위 계층 공급망 평가
  7. 공급업체 정보
  8. 부록
    1. 다양한 산업에서 사용되는 가스
    2. 가스 유형별 공급업체 목록
    3. 에칭 가스 로드맵

Report Overview

This report covers the electronic gas materials market and supply-chain for these materials used in semiconductor
device fabrication. The report contains data and analysis from TECHCET’s data base and Sr. Analyst experience, as well as that developed from primary and secondary market research.

One of the challenges that the gas companies encounter is profitability due to the timing of investments and industry downturns for large installations like Air Separation Units (ASUs) and Semiconductor fabs. In the meantime, new suppliers are emerging in the China market to support the “Made in China” program backed by the government.

When these suppliers gain in capability and capacity, their influence could dramatically impact the gas supply chain in the next 3+ years.

  • Provides focused information for supply-chain managers, process integration and R&D directors, as well as business development and financial analysts
  • Covers information about key suppliers, issues/trends in the material supply chain, estimates on supplier market share, and forecast for the material segments

[ press release ]

Electronic Gases Markets – To Approach a US$9 Billion Market in ‘22

New materials and increasing chip design complexity drives supply-chain problems for Specialty Gases, Rare Gases and Helium

San Diego, CA, June 15, 2022:  TECHCET—the electronic materials advisory firm providing business and technology information— reports that the Electronic Gases market revenues hit US$6.3 billion in 2021 and is forecasted to grow to 8% in 2022. In its recently completed Electronic Gases Report , TECHCET forecasts the 2022 Electronic Gases market will reach almost US$6.8 billion—growth primarily attributed to Specialty Gases. As leading-logic and new generations of memory continue to ramp, Specialty Gases consumed in etching, deposition, chamber cleaning, and other applications remain in strong demand. This segment is forecasted to increase by 10% in 2022 with ~9% CAGR through to 2026, as indicated in TECHCET’s newly released 2022 Critical Materials Report™ on Electronic Gases, authored by Jonas Sundqvist, PhD.
비즈니스 및 기술 정보를 제공하는 전자 재료 자문 회사— 전자 가스 시장 수익이 2021년에 63억 달러에 이르렀고 2022년에는 8%로 성장할 것으로 예상됩니다. 최근 완성된 전자 가스 보고서에서 TECHCET은 2022년 전자 가스 시장을 예측합니다. 특수 가스에 주로 기인한 성장은 거의 미화 68억 달러에 이를 것입니다. 선도적인 로직 및 새로운 세대의 메모리가 계속 증가함에 따라 에칭, 증착, 챔버 세척 및 기타 응용 분야에서 소비되는 특수 가스에 대한 수요가 계속해서 증가하고 있습니다. Jonas Sundqvist, PhD가 저술한 TECHCET의 전자 가스에 관한 2022 Critical Materials Report™에서 새로 발표된 바와 같이 이 부문은 2026년까지 ~9% CAGR로 2022년에 10% 증가할 것으로 예상됩니다.

In the near-term, there are supply issues for key industry gases, such as helium and neon; and in the longer term, the supply/demand balance for gases such as nitrogen trifluoride (NF3), tungsten hexafluoride (WF6), and others could tighten as industry demand grows.

Neon supply capacity is at risk due to the Russian invasion of Ukraine. Some gas supply from these sources may be at a permanent loss. Helium supply-chain disruptions stemming from lack of Russian supply availability are starting to have an impact on the semiconductor industry. Russia’s current export ban on helium and rare gases will prolong the supply-chain issues with Helium and rare gases like Neon. The war is only part of the helium supply issue – maintenance problems, delayed product availability, and production disruptions in other helium producing regions are all adding to the tightness in the supply chain.

As new semiconductor device fabs come online globally over the next several years, supply constraints may appear for other gases (B2H6, WF6, NF3, CF-gases) since demand increases are expected to outpace supply. With semiconductor manufacturers increasing fab production capacity, the demand for diborane (B2H6) material is rapidly increasing as it is critical in many device applications such as in doped carbon hard masks.

As more CVD/ALD deposition process passes are added for multi-patterning and EUV-lithography, cleaning demand is increasing, thus we anticipate huge growth in NF3 (used for chamber cleaning). With the current projections, demand may outrun supply causing tightness in NF3 availability come 2025-2026. Similarly, TECHCET estimates there may be supply issues with WF6 around 2025-2026. However, the possibility of molybdenum (Mo) replacing tungsten (W) for memory applications could circumvent any WF6 shortage. WF6 demand is primarily driven by vertical scaling in 3DNAND to higher layer counts, though new interconnect materials could lessen any future supply/demand imbalance.

Among the sources of electronic gases highlighted in TECHCET’s CMR are Air Products, Air Liquide, EMD / Merck, Linde, Matheson Gas, SK Materials, Gazprom, Huate Gas, Peric, and many others.

ABOUT TECHCET:  TECHCET CA LLC is an advisory services firm focused on process materials supply-chains, electronic materials business, and materials market analysis for the semiconductor, display, solar/PV, and LED industries. Since 2000, the company has been responsible for producing the Critical Material Reports™, covering silicon wafers, semiconductor gases, wet chemicals, CMP consumables, Photoresists, and ALD/CVD Precursors.


목차

Table of Contents

1 EXECUTIVE SUMMARY 13

1.1 ELECTRONIC GAS MARKET – HISTORICAL AND 5-YEAR FORECAST 14
1.2 MARKET DRIVERS FOR THE SPECIALTY GAS MARKET 15
1.2.1 SPECIALTY GAS MARKET: 5-YEAR SUPPLY & DEMAND 16
1.3 MARKET TRENDS 17
1.4 TECHNOLOGY TRENDS- DEVICE ROADMAP 20
1.4.1 TECHNOLOGY TRENDS- DEVICE SEGMENT OPPORTUNITIES 21
1.5 COMPETITIVE LANDSCAPE- ELECTRONIC GAS MARKET SHARE 22
1.6 SUPPLY CAPACITY AND DEMAND, INVESTMENTS 23
1.7 EHS AND LOGISTIC ISSUES – GREEN HOUSE GASES FROM
SEMICONDUCTOR PRODUCTION 24
1.7.1 EHS AND LOGISTIC ISSUES – GREEN HOUSE GASES FROM LOGIC
PRODUCTION 25
1.8 MARKET ASSESSMENT SUMMARY 26

2 SCOPE, PURPOSE AND METHODOLOGY 28

2.1 SCOPE 29
2.2 PURPOSE 30
2.3 METHODOLOGY 31
2.4 OVERVIEW OF OTHER TECHCET CMR™ REPORTS 32

3 SEMICONDUCTOR INDUSTRY MARKET STATUS & OUTLOOK 33

3.1 WORLDWIDE ECONOMY 34
3.1.1 SEMICONDUCTOR INDUSTRIES TIES TO THE GLOBAL ECONOMY 36
3.1.2 SEMICONDUCTOR SALES GROWTH 37
3.1.3 TAIWAN MONTHLY SALES TRENDS 38
3.2 ELECTRONIC GOODS MARKET 39
3.2.1 SMARTPHONES 40
3.2.2 PC UNIT SHIPMENTS 41
3.2.1.1 ELECTRIC VEHICLE (EV) MARKET TRENDS 42
3.2.1.2 INCREASE IN SEMICONDUCTOR CONTENT FOR AUTOS 43
3.2.2 SERVERS / IT MARKET 44
3.3 SEMICONDUCTOR FABRICATION GROWTH & EXPANSION 45
3.3.1 FAB EXPANSION ANNOUNCEMENT SUMMARY 46
3.3.2 WW FAB EXPANSION DRIVING GROWTH 47
3.3.3 EQUIPMENT SPENDING TRENDS 48
3.3.4 TECHNOLOGY ROADMAPS 49
3.3.5 FAB INVESTMENT ASSESSMENT 50
3.4 POLICY & TRADE TRENDS AND IMPACT 51
3.4.1 POLICY AND TRADE ISSUES 52
3.5 SEMICONDUCTOR MATERIALS OUTLOOK 53
3.5.1 COULD MATERIALS CAPACITY LIMIT CHIP PRODUCTION SCHEDULES? 54
3.5.2 CONTINUED LOGISTICS ISSUES PLAGUE THE WESTERN WORLD 55
3.5.3 TECHCET WAFER STARTS FORECAST THROUGH 2026 56
3.5.4 TECHCET WAFER START FORECAST 57
3.5.5 TECHCET’S MATERIALS FORECAST 58

4 ELECTRONIC GASES MARKET TREND 59

4.1 MARKET TRENDS DRIVING THE ELECTRONIC GAS BUSINESS 60
4.1.1 MARKET TRENDS – WAFER STARTS 62
4.1.2 MARKET TRENDS – WAFER STARTS LOGIC 63
4.1.3 MARKET TRENDS – WAFER STARTS DRAM 64
4.1.4 MARKET TRENDS – WAFER STARTS NAND 65
4.2 SUPPLY CAPACITY AND DEMAND, INVESTMENTS 66
4.2.1 WF6 MARKET DEMAND 69
4.2.2 WF6 DEMAND DRIVERS 72
4.2.3 WF6 MARKET DEMAND 73
4.3 TECHNICAL DRIVERS / MATERIAL CHANGES AND TRANSITIONS 74
4.3.1 GENERAL TREND LAST DECADE GOING FROM PVD & LPCVD
TO PECVD 75
4.3.2 DEVICE ROADMAP 76
4.3.3 LEADING EDGE DEVICE ARCHITECTURE 77
4.3.4 LEADING EDGE LOGIC ROADMAP 78
4.3.5 DEPOSITION PROCESS BY DEVICE TYPE AND MATERIAL—
AN OVERVIEW 79
4.3.6 DEPOSITION PROCESS BY DEVICE TYPE AND MATERIAL— AN OVERVIEW, continued 80
4.3.7 SUMMARY OF DEVICE SEGMENT TRENDS AND OPPORTUNITIES 81
4.3.8 REGIONAL TRENDS – LINDE 82
4.3.9 REGIONAL TRENDS – AIR LIQUIDE 83
4.3.10 REGIONAL TRENDS – AIR PRODUCTS 86
4.3.11 REGIONAL TRENDS – TAIYO NIPPON SANO 87
4.3.12 REGIONAL TRENDS – KOREA 88
4.3.13 REGIONAL TRENDS – CHINA 89
4.4 US SPEC GAS FOCUS & SEGMENTATION 90
4.4.1 US GROWTH FOLLOWS WAFER STARTS 91
4.4.2 SPEC GAS APPLICATIONS (FOCUS ON US MARKET) 92
4.4.3 THE US MARKETS ARE GENERALLY SMALL FOR THE CF GASES OF
INTEREST BUT EXHIBIT HEALTHY GROWTH. 93
4.4.4 THE US MARKET SIZE & GROWTH FOR SPECIALTY GASES OF INTEREST
ALSO SMALL BUT SHOWING HEALTHY GROWTH, CONTINUED 94
4.4.5 US MARKET DEPOSITION AND ETCH GASES OPPORTUNITIES 95
4.4.6 US TAM IN DOLLARS FOR INDIVIDUAL ETCH GASES— UPSIDE
FORECAST VS. ORIGINAL MODEL 96
4.4.7 US HAS A FRAGMENTED SUPPLY CHAIN 97
4.4.8 US SPEC GAS SUMMARY 98
4.4.9 SUMMARY OF OTHER REGIONAL SPECIALTY GAS ISSUES 99
4.5 EHS AND LOGISTIC ISSUES – TUNGSTEN 100
4.5.1 EHS AND LOGISTIC ISSUES – TUNGSTEN 101
4.5.2 EHS AND LOGISTIC ISSUES – RUTHENIUM 102
4.5.3 EHS AND LOGISTIC ISSUES – GREEN HOUSE GASES FROM
SEMICONDUCTOR PRODUCTION 103
4.5.4 EHS AND LOGISTIC ISSUES – GREEN HOUSE GASES FROM LOGIC
PRODUCTION 104
4.5.5 EHS AND LOGISTIC ISSUES – SUSTAINABLE SEMICONDUCTOR
TECHNOLOGIESAND SYSTEMS (SSTS) RESEARCH PROGRAM 105
4.5.6 NF3 REPLACEMENT F2 GAS 106
4.5.6.1 FLUORINATED GAS REGULATIONS 107
4.5.6.2 FLUORINATED GAS REGULATIONS 108
4.5.6.3 LINDE F-GAS INSTALLATION 109
4.6 GENERAL COMMENTS ON SPECIFICATIONS AND PURITY 110
4.7 ELECTRONIC GAS SUPPLY CHAIN RISK FACTORS 111
4.7.1 GEOPOLITICAL RISKS 112
4.7.2 RUSSIA RISKS 113
4.7.3 NATIONAL GOVERNMENT FINANCIAL SUPPORT 114
4.7.4 ENVIRONMENT REGULATION RISK 115
4.7.5 ENVIRONMENT REGULATION RISK — IMPLEMENTED TREATIES AND
PROTOCOLS 116
4.7.6 SUPPLY CHAIN RISKS — RAW MATERIAL PRICING 117
4.7.7 LOGISTICS 118
4.7.7.1 VOLUMES OF FREIGHT CONTAINERS 119
4.7.8 IMPORT ACTIVITY & ASSOCIATED RISKS (EXAMPLE US IMPORTS) 120
4.8 MARKET TREND ASSESSMENT 121

5 SEGMENT MARKET STATISTICS & FORECASTS 122

5.1 ELECTRONIC GAS MARKET – HISTORICAL AND 5-YEAR FORECAST 123
5.1.1 INDUSTRIAL GAS MARKET 124
5.1.2 ELECTRONIC GAS MARKET SHARE 125
5.1.3 SUPPLIER LIST, FINANCIALS AND PROFILES 126
5.1.4 MARKET DRIVERS FOR THE SPECIALTY GAS MARKET 127
5.2 SPECIALTY GAS MARKET: 5-YEAR SUPPLY & DEMAND 128
5.2.1 HE 5-YEAR SUPPLY & DEMAND 129
5.2.2 NE 5-YEAR SUPPLY & DEMAND 130
5.2.3 XE 5-YEAR SUPPLY & DEMAND 132
5.2.4 NF3 5-YEAR SUPPLY & DEMAND 134
5.2.5 TUNGSTEN HEXAFLUORIDE 5-YEAR SUPPLY & DEMAND 135
5.3 M&A ACTIVITIES 136
5.4 NEW PLANTS 137
5.4.1 NIHON SUO HOLDING CO., LTD. TO INCREASE DIBORANE CAPACITY 140
5.5 SUPPLIER PLANT CLOSURES 141
5.6 NEW ENTRANTS – EUROPE CHINA ELECTRONIC MATERIALS (CHINA) 142
5.6.1 NEW ENTRANTS – NIHON SOSO (JPN) – DIBORANE IN ASIA 143
5.6.2 NEW ENTRANTS – NATA CHEMICALS 144
5.7 PRICING TRENDS 145
5.8 PROCESS TOOLS SEGMENTED BY DEPOSITION METHOD 146
5.8.1 WFE DEPOSITION ASSESSMENT 147
5.9 CHANGES AND SHIFTS IN THE HE MARKET 148
5.9.1 RUSSIA WAR ESCALATES, PUTTING A DAMPER ON HE SUPPLY 149
5.9.2 MARKET SIZE AND GROWTH 5-YEAR HELIUM SUPPLY & DEMAND
(COMPRESSED GAS) 150
5.10 GAS SUPPLY ASSESSMENT 151

6 SUB TIER MATERIAL SUPPLY CHAIN 152

6.1 SALES CHANNELS 153
6.2 LOGISTICS REQUIREMENTS 154
6.2.1 SUB-TIER SUPPLY-CHAIN: TUNGSTEN DISRUPTIONS 155
6.3 SUB-TIER SUPPLY-CHAIN M&A ACTIVITY 157
6.4 SUB-TIER SUPPLY-CHAIN EHS AND LOGISTICS ISSUES 158
6.5 SUB-TIER SUPPLY-CHAIN PRICING TRENDS 159
6.6 SUB-TIER SUPPLY-CHAIN TECHCET ANALYST ASSESSMENT 160

7 SUPPLIER PROFILES 161

ADEKA Corporation
Air Liquide
AZmax Co., Ltd
DNF Co., Ltd
Entegris
Epivalence
Gelest – Mitsubishi Chemicals
Hansol Chemical
H.C. Starck
Kojundo Chemical Laboratory
…and many more

8 APPENDIX 272

8.1 GASES USED BY MULTIPLE INDUSTRIES 273
8.1.1 SPECIALTY GAS INDUSTRY MATRIX 274
8.1.2 GASES USED FOR SEMICONDUCTOR DEVICE MANUFACTURING 275
8.1.3 GASES USED IN THE DISPLAY INDUSTRY 276
8.2 SUPPLIER LISTING BY GAS TYPE 278
8.2.1 HYDRIDES 279
8.2.2 SILICON PRECURSORS (SILANES) 280
8.2.3 ETCHANTS/CHAMBER CLEAN 281
8.2.4 DEPOSITION/MISC 282
8.2.5 BULK GASES 283
8.3 ETCH GAS ROADMAPS 284
8.3.1 ETCH ROADMAPS 1 OF 3 285
8.3.2 ETCH ROADMAPS 2 OF 3 286
8.3.3 ETCH ROADMAPS 3 OF 3 287

FIGURES

FIGURE 1: ELECTRONIC GAS MARKET 14
FIGURE 2: ELECTRONIC GAS MARKET SEGMENTATION 15
FIGURE3: TECHCET WAFER START FORECAST BY NODE 17
FIGURE 4: TECHNOLOGY ROADMAP DEVICES 20
FIGURE 5: TOTAL ELECTRONIC GAS MARKET SHARE 2021, US$6,3 BILLION 22
FIGURE 6: CO2EQ OUTPUT FROM ETCH GASES (SOURCE: IMEC) 24
FIGURE 7: TOTAL EMISSIONS AND ENERGY USE PROJECTION PER
LOGIC NODE 25
FIGURE 8: GLOBAL ECONOMY AND THE ELECTRONICS SUPPLY
CHAIN (2021) 36
FIGURE 9: WORLDWIDE SEMICONDUCTOR SALES 27
FIGURE 10: TECHCET’S TAIWAN SEMICONDUCTOR INDUSTRY INDEX* 38
FIGURE 11: SEMICONDUCTOR CHIP APPLICATIONS 39
FIGURE 12: MOBILE PHONE SHIPMENTS WW ESTIMATES 40
FIGURE 13: WORLDWIDE PC AND TABLET FORECAST, 2021, Q3 41
FIGURE 14: GLOBAL EV TRENDS 42
FIGURE 15: SEMICONDUCTOR SPEND PER VEHICLE TYPE 43
FIGURE 16: TSMC CONSTRUCTION SITE IN ARIZONA. 45
FIGURE 17: CHIP EXPANSIONS 2021-2026 > US$460 B 46
FIGURE 18: SEMICONDUCTOR CHIP MANUFACTURING REGIONS OF
THE WORLD 47
FIGURE 19: 3-MONTH AVERAGE SEMICONDUCTOR EQUIPMENT BILLINGS 48
FIGURE 20: OVERVIEW OF DEVICE TECHNOLOGY ROADMAP 49
FIGURE 21: EUROPE CHIP EXPANSION UPSIDE 54
FIGURE 22: TECHCET WAFER START FORECAST BY NODE 56
FIGURE 23: TECHCET WAFER START FORECAST BY LOGIC NODE 57
FIGURE 24: GLOBAL SEMICONDUCTOR MATERIALS OUTLOOK 58
FIGURE 25: FORECASTS – WAFER STARTS 2018 TO 2026 62
FIGURE 26: FORECASTS – WAFER STARTS LOGIC 300 MM 63
FIGURE 27: ANNUAL WAFER DRAM STARTS (MILLIONS OF 200MM
EQUIVALENT / YEAR) 64
FIGURE 28: ANNUAL NAND WAFER STARTS (MILLIONS OF 200MM
EQUIVALENT / YEAR) 65
FIGURE 29: 3DNAND STRUCTURE 69
FIGURE 30: MO PRECURSORS 70
FIGURE 31: AMPOULE TECH REQUIREMENTS 71
FIGURE 32: 3DNAND WAFER START FORECAST SHOWING USAGE OF
W & MO TRANSITION 72
FIGURE 33: WAFER START FORECAST SHOWING TWO TIMING SCENARIOS
WHERE MO COULD BE INTRODUCED (MILLIONS OF
200MM EQUIVALENT / YEAR) 73
FIGURE 34: ALD FOR PHOTOLITHOGRAPHY IP 74
FIGURE 35: 3D DEVICE ARCHITECTURES 75
FIGURE 36: DEVICE TECHNOLOGY ROADMAPS 76
FIGURE 37: IMEC 2021 LOGIC ROADMAP 77
FIGURE 38: SCALING AND LITHOGRAPHY TRENDS 78
FIGURE 39: FINFET/GAA TRANSITION 79
FIGURE 40: AIR LIQUIDE REGIONAL FINANCIALS 83
FIGURE 41: AIR LIQUIDE REGIONAL FINANCIALS 84
FIGURE 42: AIR LIQUIDE REGIONAL FINANCIALS 85
FIGURE 43: WAFER START UPSIDE FROM US FAB EXPANSION 91
FIGURE 44: US REGIONAL 5-YEAR GROWTH FORECASTS FOR C4F6,
C4F8,CH3F AND CH2F2 93
FIGURE 45: US REGIONAL 5-YEAR FORECASTS FOR CL2, BCL3, HBR 94
FIGURE 46 : US REGIONAL 5-YEAR FORECASTS FOR WF6 & NF3 95
FIGURE 47: WAFER START UPSIDE FROM US FAB EXPANSION 96
FIGURE 48: CO2EQ OUTPUT FROM ETCH GASES (SOURCE: IMEC) 103
FIGURE 49: TOTAL EMISSIONS AND ENERGY USE PROJECTION PER
LOGIC NODE 104
FIGURE 50: F2 AND NF3 ACTIVATION 106
FIGURE 51: CHINA SPOT PRICES OF KEY RAW MATERIALS 117
FIGURE 52: PORT TRAFFIC LA AND LONG BEACH 118
FIGURE 53: CONTAINER FREIGHT PRICE IN USD 118
FIGURE 54: POLA CONTAINER VOLUMES 119
FIGURE 55: ELECTRONIC GAS MARKET 123
FIGURE 56: TOTAL INDUSTRIAL GAS MARKET 2021, US$97 BILLION 124
FIGURE 57: TOTAL ELECTRONIC GAS MARKET 2021, US$6,3 BILLION 125
FIGURE 58: ELECTRONIC GAS MARKET SEGMENTATION 127
FIGURE 59: HE WW SUPPLY AND DEMAND 129
FIGURE 60: 2026 HE MARKET SHARE – WW REGIONS 130
FIGURE 61: TOTAL NEON DEMAND VS. SUPPLY 131
FIGURE 62: TOTAL XENON DEMAND VS. SUPPLY (MILLION LITERS/YR) 132
FIGURE 63: TOTAL KRYPTON DEMAND VS. SUPPLY (MILLION LITERS/YR) 133
FIGURE 64: NF3 SUPPLY/DEMAND 134
FIGURE 65: WF6 FORECAST 135
FIGURE 66: HARDMASK SCHEMATIC 140
FIGURE 67: LATEST SITUATION MAP IN UKRAINE, SHOWING TAKEN
MAURIUPOL BUT ODESSA STILL FREE 141
FIGURE 68: ECEM PRODUCT OFFERINGS 142
FIGURE 69: NIHON SOSO ELECTRONICS GAS BUSINESS IN ASIA 143
FIGURE 70: NATA CHEMICALS FACILITIES 144
FIGURE 71: COMPRESSED NEON PRICE ESCALATION 145
FIGURE 72: DEPOSITION SEGMENTS (USD BILLION) 146
FIGURE 73: HELIUM ELECTRONICS MARKET DEMAND BASED ON
APPLICATIONS ~16% (CONSERVATIVE) TO 19% (UPSIDE) IN MCM 150
FIGURE 74: HE MATERIALS SUPPLIER TIER STRUCTURE 153
FIGURE 75: TUNGSTEN USE BY INDUSTRY (TECHCET ESTIMATE 2020) 155
FIGURE 76: ELECTRONIC SPECIALTY GASES 277
FIGURE 77: BULK GASES 277

TABLES
TABLE 1: ELECTRONIC GAS MARKET SIZE AND GROWTH 14
TABLE 2: ELECTRONIC GAS MARKET GROWTH RATES BY END MARKET 15
TABLE 3: 5-YEAR SPECIALTY GAS SUPPLY & DEMAND 16
TABLE 4: GAS TRENDS AND OPPORTUNITIES BY DEVICE TYPE & PROCESS
TECHNOLOGY 21
TABLE 5: GLOBAL GDP AND SEMICONDUCTOR REVENUES* 34
TABLE 6: IMF ECONOMIC OUTLOOK* 35
TABLE 7: DATA CENTER SYSTEMS AND COMMUNICATION SERVICES
FORECAST 2021 44
TABLE 8: OVERVIEW OF DEPOSITION PROCESSES BY DEVICE TYPE
AND MATERIAL 79
TABLE 9: GAS TRENDS AND OPPORTUNITIES BY DEVICE TYPE 81
TABLE 10: LINDE FINANCIALS AND REGIONAL SALES 82
TABLE 11: AIR PRODUCTS REGIONAL FINANCIALS 86
TABLE 12: TAIYO NIPPON SANSO REGIONAL FINANCIALS 87
TABLE 13: GAS SEGMENTATION GROUPS/DEFINITIONS 90
TABLE 14: GASES OF INTEREST AND APPLICATIONS 92
TABLE 15: C4F6, C4F8, CH2F2, CHF3, CAGRS (2021-2025) 93
TABLE 16: CL2, BCL3, HBR, CAGRS (2021-2025) 94
TABLE 17: WF6 AND NF3 FORECAST AND CAGRS (2021-2025) 95
TABLE 18: US TAM UPSIDE FOR WF6 AND NF3 (M$USD) 96
TABLE 19: ESTIMATED SUPPLY CHAIN SUPPLIER RANKING 97
TABLE 20: REGIONAL SUMMARY OF GAS MARKET 99
TABLE 21: GAS GWP AND ATMOSPHERIC LIFETIME 106
TABLE 22: IMPORT ACTIVITY OCTOBER 2020 THROUGH MAY 2021 120
TABLE 23: ELECTRONIC GAS MARKET SIZE AND GROWTH 123
TABLE 24: TOTAL REVENUE 2021OF MAJOR GAS COMPANIES
AND GAS SUPPLIERS 126
TABLE 25: ELECTRONIC GAS MARKET GROWTH RATES BY END MARKET 127
TABLE 26: 5-YEAR SPECIALTY GAS SUPPLY & DEMAND 128
TABLE 27: M&A ACTIVITIES 136
TABLE 28: EQUIPMENT MARKET SIZE (US$ B) 146
TABLE 29: SPECIALTY GAS INDUSTRY MATRIX 274
TABLE 30: GASES USED IN FPD MANUFACTURING 276
TABLE 31: HYDRIDE GAS SUPPLIERS 279
TABLE 32: SILICON PRECURSOR SUPPLIERS 280
TABLE 33: ETCHANT GAS SUPPLIERS 281
TABLE 34: DEPOSITION/MISC. GAS SUPPLIERS 282
TABLE 35: BULK GAS SUPPLIERS 283
TABLE 36: ETCH ROADMAPS 285
TABLE 37: ETCH ROADMAPS 286
TABLE 38: ETCH ROADMAPS 287


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