전자 가스 (Electronic Gases) 시장 조사 2023년

출판 : TECHCET   출판년월 : 2023년05월

ELECTRONIC GASES: Bulk & Specialty Gases
전자 가스 시장 조사 2023년 : 벌크 가스와 특수 가스
Electronic Gases including Ne & Xe Market Report CMR 2023-2024

※Chapter 8(Supplier Profiles)의 페이지수는 포함되어 있지 않습니다.

리포트목차　　　　주문/문의　　　　납기/라이센스안내

TECHCET의 시장 조사 리포트 「전자 가스 시장 조사 2023년：벌크 가스와 특수 가스 – Electric Gases: Bulk & Specialty Gases」는 반도체 제조에 사용되는 재료 가스 시장을 조사하여 시장 전망, 시장 동향, 공급망 정보 등을 게재하고 있습니다.

주요 게시물

1. 이그제큐티브 요약
2. 조사 범위, 목표, 방법론
3. 반도체 산업의 시장 상황과 전망
   1. 세계 경제
   2. 전자 제품 세그먼트별 칩 판매
   3. 반도체 제조 성장 및 확대
   4. 정책 및 무역 동향 및 영향
   5. 반도체 재료 전망
4. 전자 가스 시장 동향
   1. 전자 가스 사업을 촉진하는 시장 동향
   2. 공급 능력과 수요, 투자
   3. 기술의 촉진요인/재료 변화 및 변천
   4. 지역별 동향
   5. 사양 및 순도에 대한 일반적인 견해
   6. 전자 가스 공급망 위험 요소
   7. 시장 동향 평가
5. EHS와 지속가능성 문제
   1. EHS와 물류 문제
   2. 지속 가능한 반도체 공정 및 제조 기술
   3. 헬륨: 지속가능한 제품 – 그린헬륨
   4. NF3 대안: F2 가스
6. 시장 통계 및 예측
   1. 전자 가스 시장: 실적 및 5년 예측
   2. 특수 가스 시장: 5년간의 수요 및 공급
   3. M&A
   4. 신규 공장
   5. 공급업체 공장 폐쇄
   6. 가격 동향
   7. 가스 공급 평가
7. 서브티어 소재 공급망
   1. 판매 채널
   2. 물류 요건
   3. 서브티어 공급망 M&A
   4. 서브티어 공급망의 EHS 및 물류 문제
   5. 서브티어 공급망 가격 동향
   6. 텍셋 분석가를 통한 서브티어 공급망 평가
8. 공급자 정보 – 세계 주요 기업 20개 이상의 전자 가스 공급업체 개요
9. 부록
   1. 다양한 산업에서 사용되는 가스
   2. 가스 유형별 공급업체 목록
   3. 에칭 가스 로드맵

Report Overview

This report covers the electronic gas materials market and supply-chain for these materials used in semiconductor device fabrication. One of the challenges that the gas companies encounter is profitability due to the timing of investments and industry downturns for large installations like Air Separation Units (ASUs) and Semiconductor fabs. In the meantime, new suppliers are emerging in the China market to support the “Made in China” program backed by the government. When these suppliers gain in capability and capacity, their influence could dramatically impact the gas supply chain in the next 3+ years.

ANALYST BIOGRAPHY

• Jonas Sundqvist, Ph.D. – Sr. Technology Analyst of TECHCET & Assoc. Prof. in Chemistry at Linköping University, Sweden — covers Electronic Gases and ALD & CVD precursors and related technologies, and the co-chair of the Annual Critical Materials Council (CMC) Conference. His over 20 years of work experience includes Group Leader of the Thin-Film Technologies Group at The Fraunhofer Institute for Ceramic Technologies and Systems (IKTS) in Germany, Clean Room Operations Manager for Lund Nano Lab, Lund University in Sweden and Group Leader of the ALD & High-k devices group at Fraunhofer’s Center Nanoelectronic Technologies (CNT) in Germany, which included 28nm node work for GLOBALFOUNDRIES Fab1.
• Previously, at Infineon Memory Development Centre (MDC), he developed high-k and metal nitride ALD processes and equipment, and at Qimonda, he was a materials manager focused on the ALD/CVD precursors supply-chain. He holds a Ph.D. and an M.S.  in inorganic chemistry from Uppsala University, Sweden & Institute for Micromanufacturing, Louisiana Techet, USA, a B.S. in electrical and electronics engineering from Lars Kagg, and
  nine patents and 40 related scientific publications.
• Jonas Sundqvist is on the Scientific Committee for AVS ALD and has co-chaired ALD2016
  Dublin Ireland, and the annual EFDS ALD for Industry Workshop in Germany. He is the CoChair of the annual Critical Materials Conference organized by TECHCET LLC CA.

목차

1 EXECUTIVE SUMMARY 13

1.1 ELECTRONIC GAS MARKET – HISTORICAL AND 5-YEAR FORECAST 14
1.2 MARKET DRIVERS FOR THE SPECIALTY GAS MARKET 15
1.2.1 SPECIALTY GAS MARKET: 5-YEAR SUPPLY & DEMAND 16
1.3 MARKET TRENDS 17
1.4 TECHNOLOGY TRENDS– DEVICE ROADMAP 21
1.4.1 TECHNOLOGY TRENDS – DEVICE SEGMENT OPPORTUNITIES 22
1.5 COMPETITIVE LANDSCAPE– ELECTRONIC GAS MARKET SHARE 23
1.6 SUPPLY CAPACITY AND DEMAND, INVESTMENTS 24
1.7 EHS AND LOGISTIC ISSUES– GREEN HOUSE GASES FROM LOGIC PRODUCTION 25
1.8 MARKET ASSESSMENT SUMMARY 28

2 SCOPE, PURPOSE AND METHODOLOGY 30

2.1 SCOPE 31
2.2 PURPOSE 32
2.3 METHODOLOGY 33
2.4 OVERVIEW OF OTHER TECHCET CMR™ REPORTS 34

3 SEMICONDUCTOR INDUSTRY MARKET STATUS & OUTLOOK 35

3.1 WORLDWIDE ECONOMY 36
3.1.1 SEMICONDUCTOR INDUSTRIES TIES TO THE GLOBAL ECONOMY 38
3.1.2 SEMICONDUCTOR SALES GROWTH 39
3.1.3 TAIWAN MONTHLY SALES TRENDS 40
3.1.4 UNCERTAINTY ABOUNDS ESPECIALLY FOR 2023 – SLOWER TO NEGATIVE SEMICONDUCTOR REVENUE GROWTH EXPECTED 41
3.2 CHIPS SALES BY ELECTRONIC GOODS SEGMENT 42
3.2.1 SMARTPHONES 43
3.2.2 PC UNIT SHIPMENTS 44
3.2.3 SERVERS / IT MARKET 47
3.3 SEMICONDUCTOR FABRICATION GROWTH & EXPANSION 48
3.3.1 FAB EXPANSION ANNOUNCEMENT SUMMARY 49
3.3.2 WW FAB EXPANSION DRIVING GROWTH 51
3.3.3 EQUIPMENT SPENDING TRENDS 52
3.3.4 TECHNOLOGY ROADMAPS 53
3.3.5 FAB INVESTMENT ASSESSMENT 54
3.4 POLICY & TRADE TRENDS AND IMPACT 55
3.5 SEMICONDUCTOR MATERIALS OVERVIEW 56
3.5.1 COULD MATERIALS CAPACITY LIMIT CHIP PRODUCTION SCHEDULES? 57
3.5.2 LOGISTICS ISSUES EASED DOWN 58
3.5.3 TECHCET WAFER STARTS FORECAST THROUGH 2027 59
3.5.4 TECHCET’S MATERIAL FORECAST 60

4 ELECTRONIC GASES MARKET TRENDS 61

4.1 MARKET TRENDS DRIVING THE ELECTRONIC GAS BUSINESS 62
4.2 SUPPLY CAPACITY AND DEMAND, INVESTMENTS 64
4.2.1 WF6 DEMAND DRIVERS 67
4.2.2 WF6 MARKET DEMAND 68
4.2.3 WF6 MARKET DEMAND– MO ALD IP FILING 70
4.2.4 WF6 MARKET DEMAND 71
4.3 TECHNICAL DRIVERS / MATERIAL CHANGES AND TRANSITIONS 72
4.3.1 GENERAL TREND LAST DECADE GOING FROM PVD & LPCVD TO PECVD 73
4.3.2 MARKET TRENDS BY DEVICE TYPE AND NODE – ADVANCED DEVICES 74
4.3.3 MARKET TRENDS– ADVANCED LOGIC 75
4.3.4 MARKET TRENDS– WAFER STARTS DRAM 79
4.3.5 MARKET TRENDS– WAFER STARTS NAND 81
4.3.6 DEPOSITION PROCESS BY DEVICE TYPE AND MATERIAL– AN OVERVIEW 84
4.3.7 ETCH PROCESS BY DEVICE TYPE– ATOMIC LAYER ETCHING ALE 86
4.3.8 SUMMARY OF TECHNICAL TRENDS AND OPPORTUNITIES 92
4.4 REGIONAL TRENDS 93
4.4.1 REGIONAL TRENDS – LINDE 94
4.4.2 REGIONAL TRENDS– AIR LIQUIDE 95
4.4.3 REGIONAL TRENDS– AIR PRODUCTS 96
4.4.5 REGIONAL TRENDS– TAIYO NIPPON SANO 97
4.4.6 REGIONAL TRENDS– KOREA 98
4.4.7 REGIONAL TRENDS– JAPAN 99
4.4.8 REGIONAL TRENDS– JAPAN & KOREA 100
4.3.15 REGIONAL TRENDS– CHINA 101
4.4.9 REGIONAL TRENDS – RUSSIA 102
4.4.10 REGIONAL TRENDS– USA 103
4.5 GENERAL COMMENTS ON SPECIFICATIONS AND PURITY 106
4.6 ELECTRONIC GAS SUPPLY CHAIN RISK FACTORS 107
4.6.1 GEOPOLITICAL RISKS 108
4.6.2 RUSSIA RISKS 109
4.6.3 SUPPLY CHAIN RISKS– RAW MATERIAL PRICING 110
4.6.4 LOGISTICS 111
4.7 MARKET TRENDS ASSESSMENT 112

5 EHS AND SUSTAINABILITY ISSUES 113

5.1 EHS AND LOGISTIC ISSUES– GREEN HOUSE GASES FROM SEMICONDUCTOR PRODUCTION 114
5.1.2 EHS AND LOGISTIC ISSUES– GREEN HOUSE GASES FROM SEMICONDUCTOR PRODUCTION, CONTINUED 115
5.2 EHS AND LOGISTICS ISSUES 116
5.3 EHS AND LOGISTIC ISSUE – GREEN HOUSE GASES FROM SEMICONDUCTOR PRODUCTION 117
5.4 EHS AND LOGISTIC ISSUES– GREEN HOUSE GASES FROM AIR GASES (NEON) 118
5.4.1 ASU ENERGY CONSUMPTION – GHG EMISSIONS 119
5.4.2 ASU ENERGY CONSUMPTION – GHG EMISSIONS 120
5.4.3 CARBON FOOTPRINT OF SHIFTING NEON SUPPLY FROM UKRAINE TO CHINA 121
5.4.4 CARBON FOOTPRINT OF NEON PRODUCTION 122
5.4.5 CARBON FOOTPRINT OF NEON SHIPPING IN GAS ISO CONTAINER 123
5.4.6 DRAFT CALCULATION TRANSPORT: CHINA VS UKRAINE 124
5.5 SUSTAINABLE SEMICONDUCTOR PROCESSES AND MANUFACTURING TECHNOLOGIES 125
5.6 HELIUM – SUSTAINABLE PRODUCTION – GREEN HELIUM 126
5.7 HELIUM – SUSTAINABLE PRODUCTION – GREEN HELIUM 127
5.8 NF3 REPLACEMENT: F2 GAS 128
5.8.1 FLUORINATED GAS REGULATIONS 129
5.8.2 FLUORINATED GAS REGULATIONS, CONTINUED 130
5.8.3 LINDE F-GAS INSTALLATION 131
5.8.4 ENVIRONMENT REGULATION RISK– IMPLEMENTED TREATIES AND PROTOCOLS 132

6 ELECTRONIC GASES MARKET STATISTICS & FORECASTS 133

6.1 ELECTRONIC GAS MARKET– HISTORICAL AND 5-YEAR FORECAST 134
6.1.1 INDUSTRIAL GAS MARKET 135
6.1.2 ELECTRONIC GAS MA 136
6.1.3 SUPPLIER LIST, FINANCIALS AND PROFILES 137
6.1.4 MARKET DRIVERS FOR THE SPECIALTY GAS MARKET 138
6.2 SPECIALTY GAS MARKET: 5-YEAR SUPPLY & DEMAND RKET SHARE 139
6.2.1 HE 5-YEAR SUPPLY & DEMAND 140
6.2.1 HE 5-YEAR SUPPLY & DEMAND, CONTINUED 141
6.2.2 NE 5-YEAR SUPPLY & DEMAND 142
6.2.3 NEON 143
6.2.4 XE 5-YEAR SUPPLY & DEMAND 144
6.2.5 NF3 5-YEAR SUPPLY & DEMAND 146
6.2.6 TUNGSTEN HEXAFLUORIDE 5-YEAR SUPPLY & DEMAND 147
6.3 M&A ACTIVITIES 148
6.4 NEW PLANTS 149
6.4.1 NEW PLANTS, LINDE EXPANSIONS 2023 152
6.4.2 NEW PLANTS, AIR LIQUIDE EXPANSIONS 2022/2023 153
6.4.3 NIHON SUO HOLDING CO., LTD. TO INCREASE DIBORANE CAPACITY 154
6.5 SUPPLIER PLANT CLOSURES 155
6.5.1 NEW ENTRANTS– SK MATERIALS, SHOWA DENKO SEEK JOINT ENTRY INTO US SEMICONDUCTOR GAS MARKET 156
6.5.2 NEW ENTRANTS– RESONAC 157
6.5.3 NEW ENTRANTS– NEON, CHINA 158
6.6 PRICING TRENDS 159
6.7 GAS SUPPLY ASSESSMENT 160

7 SUB TIER MATERIAL SUPPLY CHAIN 161

7.1 SALES CHANNELS 162
7.2 LOGISTICS REQUIREMENTS 163
7.2.1 SUB-TIER SUPPLY-CHAIN: TUNGSTEN DISRUPTIONS 164
7.3 SUB-TIER SUPPLY-CHAIN M&A ACTIVITY 166
7.4 SUB-TIER SUPPLY-CHAIN EHS AND LOGISTICS ISSUES 167
7.5 SUB-TIER SUPPLY-CHAIN PRICING TRENDS 168
7.6 SUB-TIER SUPPLY-CHAIN TECHCET ANALYST ASSESSMENT 169

8 SUPPLIER PROFILES 170

AIR LIQUIDE
AIR PRODUCTS
AIR WATER
CRYOIN ENGINEERING
DUPONT
And 20+ more

9 APPENDIX 287

9.1 GASES USED BY MULTIPLE INDUSTRIES 288
9.1.1 SPECIALTY GAS INDUSTRY MATRIX 289
9.1.2 GASES USED FOR SEMICONDUCTOR DEVICE MANUFACTURING 290
9.1.3 GASES USED IN THE DISPLAY INDUSTRY 291
9.2 SUPPLIER LISTING BY GAS TYPE 294
9.2.1 HYDRIDES 295
9.2.2 SILICON PRECURSORS (SILANES) 296
9.2.3 ETCHANTS/CHAMBER CLEAN 297
9.2.4 DEPOSITION/MISC 298
9.2.5 BULK GASES 299
9.3 ETCH GAS ROADMAPS 300
9.3.1 ETCH ROADMAPS 1 OF 3 301
9.3.2 ETCH ROADMAPS 2 OF 3 302
9.3.3 ETCH ROADMAPS 3 OF 3 303

LIST OF FIGURES

FIGURE 1: ELECTRONIC GAS MARKET 14
FIGURE 2: ELECTRONIC GAS MARKET SEGMENTATION 15
FIGURE 3: TECHCET WAFER START FORECAST BY NODE 17
FIGURE 4: TECHNOLOGY ROADMAP DEVICES 21
FIGURE 5: TOTAL ELECTRONIC GAS MARKET SHARE 2021, US$6,3 BILLION 23
FIGURE 6: AIR GAS BOILING POINT 25
FIGURE 7: COMPARISON OF CO2 EMISSIONS FROM VARIOUS
TRANSPORTATION MODES 26
FIGURE 8: OCEAN CONTAINER PRICE INDEX – JULY ‘20 TO MARCH ‘23 27
FIGURE 9: GLOBAL ECONOMY AND THE ELECTRONICS SUPPLY CHAIN (2022) 38
FIGURE 10: WORLDWIDE SEMICONDUCTOR SALES 39
FIGURE 11: TECHCET’S TAIWAN SEMICONDUCTOR INDUSTRY INDEX (TTSI)* 40
FIGURE 12: 2023 SEMICONDUCTOR INDUSTRY REVENUE GROWTH FORECASTS 41
FIGURE 13: 2022 SEMICONDUCTOR CHIP APPLICATIONS 42
FIGURE 14: MOBILE PHONE SHIPMENTS WW ESTIMATES 43
FIGURE 15: WORLDWIDE PC AND TABLET FORECAST 44
FIGURE 16: ELECTRIFICATION TREND BY WORLD REGION 45
FIGURE 17: SEMICONDUCTOR AUTOMOTIVE PRODUCTION 46
FIGURE 18: TSMC PHOENIX INVESTMENT ESTIMATED WILL BE US $40 B 48
FIGURE 19: CHIP EXPANSIONS 2022-2027 US$366 B 49
FIGURE 20: SEMICONDUCTOR CHIP MANUFACTURING REGIONS OF THE WORLD 51
FIGURE 21: GLOBAL TOTAL EQUIPMENT SPENDING BY SEGMENT (US$ B) 52
FIGURE 22: OVERVIEW OF ADVANCED LOGIC DEVICE TECHNOLOGY ROADMAP 53
FIGURE 23: INTEL OHIO PLANT SITE FEB. 2023 AND ARTIST RENDERING
(ON BOTTOM) 54
FIGURE 24: EUROPE CHIP EXPANSION UPSIDE 57
FIGURE 25: PORT OF LA 58
FIGURE 26: TECHCET WAFER START FORECAST BY NODE SEGMENTS** 59
FIGURE 27: GLOBAL SEMICONDUCTOR MATERIALS OUTLOOK 60
FIGURE 28: 2D PHASE OF BORON AS POSSIBLE FUTURE TRANSISTOR CHANNEL 66
FIGURE 29: 3DNAND MARKET SHARE 2022 67
FIGURE 30: 3DNAND STRUCTURE 68
FIGURE 31: MO PRECURSORS 69
FIGURE 32: PATENT FAMILIES FILED FOR MOLYBDENUM ALD IN
THE MEMORY SPACE 70
FIGURE 33:WAFER START FORECAST SHOWING TWO TIMINGSCENARIOS WHERE MO
COULD BE INTRODUCED (MILLIONS OF 200 MM EQUIVALENT / YEAR) 71
FIGURE 34: 3D DEVICE ARCHITECTURES 73
FIGURE 35: FORECASTS – WAFER STARTS 2021 TO 2027 74
FIGURE 36: FORECASTS – WAFER STARTS LOGIC 300 MM 75
FIGURE 37: SAMSUNG START 3 NM PILOT RAMP USING GAA-FET TECHNOLOGY
JUNE 2022 76
FIGURE 38: IMEC 2022 LOGIC ROADMAP 77
FIGURE 39: APPLIED MATERIALS CENTURA PATTERN SHAPING CLUSTER 78
FIGURE 40: FORECASTS – WAFER STARTS DRAM 300 MM 79
FIGURE 41: IP FILING IN THE FIELD OF 3DRAM IS ACCELERATING 80
FIGURE 42: FORECASTS – WAFER STARTS NAND 300 MM 81
FIGURE 43: PATHWAYS FOR CONTINUED 3D NAND SCALING 82
FIGURE 44: 3DNAND SCALING FROM 1 STACK TO 4 STACKS 83
FIGURE 45: SELECTIVE W LOWERS RESISTANCE 85
FIGURE 46: FINFET/GAA TRANSITION 86
FIGURE 47: SELECTIVITY IMPROVEMENT WITH ALE 87
FIGURE 48: ALD AND ALE ROADMAPS OF INTEL, TSMC AND SAMSUNG 88
FIGURE 49: DEP – ALE STI FILL AND RECESS ETCH 90
FIGURE 50: PLASMA AND THERMAL ALE PROCESSES 91
FIGURE 51: AIR LIQUIDE FINANCIALS (ANNUAL REPORT 2022 PENDING) 95
FIGURE 52: KOREA 2021 NEON IMPORTS 98
FIGURE 53: RESONAC BUSINESS SEGMENT REVENUE 2022 99
FIGURE 54: TOTAL HELIUM PRODUCTION 160 MILLION M3 102
FIGURE 55: FLUORSPAR PRICE IN US 2014-2022 110
FIGURE 56: OCEAN CONTAINER PRICE INDEX – JULY ‘20 TO MARCH ‘23 111
FIGURE 57: CO2 EMISSIONS CONTRIBUTIONS WITHIN A CHIP FAB 114
FIGURE 58: GLOBAL WARMING IMPACT FROM VARIOUS PROCESS GASES 115
FIGURE 59: TOTAL EMISSIONS AND ENERGY USE PROJECTION PER LOGIC NODE 116
FIGURE 60: CO2EQ OUTPUT FROM ETCH GASES 117
FIGURE 61: AIR SEPARATION UNIT FLOW CHART 118
FIGURE 62: AIR GAS BOILING POINT 119
FIGURE 63: CARBON GENERATION FROM AIR SEPARATION PROCESSES 120
FIGURE 64: COMPARISON OF CO2 EMISSIONS FROM VARIOUS
TRANSPORTATION MODES 123
FIGURE 65: F2 AND NF3 ACTIVATION 128
FIGURE 66: ELECTRONIC GAS MARKET 134
FIGURE 67: TOTAL INDUSTRIAL GAS MARKET 2021, US$97 BILLION 135
FIGURE 68: TOTAL ELECTRONIC GAS MARKET 2021, US$6,3 BILLION 136
FIGURE 69: ELECTRONIC GAS MARKET SEGMENTATION 138
FIGURE 70: HE WW SUPPLY AND DEMAND 140
FIGURE 71: 2027 HELIUM SUPPLY 141
FIGURE 72: TOTAL NEON DEMAND VS. SUPPLY 142
FIGURE 73: KOREA 2021 NEON IMPORTS 143
FIGURE 74: TOTAL XENON DEMAND VS. SUPPLY (MILLION LITERS/YR) 144
FIGURE 75: TOTAL KRYPTON DEMAND VS. SUPPLY (MILLION LITERS/YR) 145
FIGURE 76: NF3 SUPPLY/DEMAND 146
FIGURE 77: AWF6 FORECAST 147
FIGURE 78: HARDMASK SCHEMATIC 154
FIGURE 79: LATEST SITUATION MAP IN UKRAINE, SHOWING TAKEN MAURIUPOL
BUT ODESSA STILL FREE 155
FIGURE 80: RESONAC BUSINESS SEGMENT REVENUE 2022 157
FIGURE 81: RARE GAS PRICE ESCALATION 159
FIGURE 65: F2 AND NF3 ACTIVATION 128
FIGURE 66: ELECTRONIC GAS MARKET 134
FIGURE 67: TOTAL INDUSTRIAL GAS MARKET 2021, US$97 BILLION 135
FIGURE 68: TOTAL ELECTRONIC GAS MARKET 2021, US$6,3 BILLION 136
FIGURE 69: ELECTRONIC GAS MARKET SEGMENTATION 138
FIGURE 70: HE WW SUPPLY AND DEMAND 140
FIGURE 71: 2027 HELIUM SUPPLY 141
FIGURE 72: TOTAL NEON DEMAND VS. SUPPLY 142
FIGURE 73: KOREA 2021 NEON IMPORTS 143
FIGURE 74: TOTAL XENON DEMAND VS. SUPPLY (MILLION LITERS/YR) 144
FIGURE 75: TOTAL KRYPTON DEMAND VS. SUPPLY (MILLION LITERS/YR) 145
FIGURE 76: NF3 SUPPLY/DEMAND 146
FIGURE 77: AWF6 FORECAST 147
FIGURE 78: HARDMASK SCHEMATIC 154
FIGURE 79: LATEST SITUATION MAP IN UKRAINE, SHOWING TAKEN MAURIUPOL
BUT ODESSA STILL FREE 155
FIGURE 80: RESONAC BUSINESS SEGMENT REVENUE 2022 157
FIGURE 81: RARE GAS PRICE ESCALATION 159
FIGURE 82: HE MATERIALS SUPPLIER TIER STRUCTURE 162
FIGURE 83: TUNGSTEN USE BY INDUSTRY (TECHCET ESTIMATE) 165
FIGURE 84: ELECTRONIC SPECIALTY GASES 177
FIGURE 85: BULK GASES 177

LIST OF TABLES

TABLE 1: SPECIALTY AND BULK GAS REVENUE 2022, 2027 14
TABLE 2: ELECTRONIC GAS MARKET GROWTH RATES BY END MARKET 15
TABLE 3: 5-YEAR SPECIALTY GAS SUPPLY & DEMAND 16
TABLE 4: GAS TRENDS AND OPPORTUNITIES BY DEVICE TYPE & PROCESS
TECHNOLOGY 22
TABLE 5: GLOBAL GDP AND SEMICONDUCTOR REVENUES* 36
TABLE 6: IMF ECONOMIC OUTLOOK* 37
TABLE 7: DATA CENTER SYSTEMS AND COMMUNICATION SERVICES MARKET
SPENDING 2022 47
TABLE 8: OVERVIEW OF DEPOSITION PROCESSES BY DEVICE TYPE AND MATERIAL 84
TABLE 9: ETCH GASES SUMMARY TABLE 91
TABLE 10: GAS TRENDS AND OPPORTUNITIES BY DEVICE TYPE 92
TABLE 11: LINDE FINANCIALS AND REGIONAL SALES 94
TABLE 12: AIR PRODUCTS REGIONAL FINANCIALS 96
TABLE 13: TAIYO NIPPON SANSO REGIONAL FINANCIALS 97
TABLE 14: ESTIMATED SUPPLY CHAIN SUPPLIER RANKING 104
TABLE 15: REGIONAL SUMMARY OF GAS MARKET 105
TABLE 16: CO2 EMISSIONS PER TONS SHIPPED BY OCEAN, TRUCK OR RAIL 124
TABLE 17: GAS GWP AND ATMOSPHERIC LIFETIME 128
TABLE 18: ELECTRONIC GAS MARKET SIZE AND GROWTH 134
TABLE 19: TOTAL REVENUE 2022 COMPARED TO 2021 OF MAJOR GAS COMPANIES
AND GAS SUPPLIERS 137
TABLE 20: ELECTRONIC GAS MARKET GROWTH RATES BY END MARKET 138
TABLE 21: 5-YEAR SPECIALTY GAS SUPPLY & DEMAND 139
TABLE 22: M&A ACTIVITIES 148
TABLE 23: SPECIALTY GAS INDUSTRY MATRIX 173
TABLE 24: GASES USED IN FPD MANUFACTURING 176
TABLE 25: HYDRIDE GAS SUPPLIERS 179
TABLE 26: SILICON PRECURSOR SUPPLIERS 180
TABLE 27: ETCHANT GAS SUPPLIERS 181
TABLE 28: DEPOSITION/MISC. GAS SUPPLIERS 182
TABLE 29: BULK GAS SUPPLIERS 183
TABLE 30: ETCH ROADMAPS 185
TABLE 31: ETCH ROADMAPS 186
TABLE 32: ETCH ROADMAPS 187

[보도자료]
Electronic Gases Demand to Increase as Semiconductor Fab Expansions Move Forward

June 1, 2023

Critical gases like B2H6 and WF6 may face supply constraints

San Diego, CA, June 1, 2023: TECHCET — the electronic materials advisory firm providing business and technology information on semiconductor supply chains — is forecasting an upward 5-year CAGR of 6.4% for the electronic gas market, as indicated in the newly released Electronic Gases Critical Materials Report™. This positive forecast in electronic gases is primarily due to expansions within the semiconductor industry, with leading-edge logic and 3DNAND applications being the most impactful to growth. As ongoing fab expansions come online in the next few years, additional supply of gases will be necessary to accommodate demand, hence upping market performance for gases. In the US, there are currently six major chipmakers planning to build new fabs: GlobalFoundries, Intel, Samsung, TSMC, Texas Instruments, and Micron Technology.

Supply constraints for electronic gases may appear as demand increases are expected to outpace supply. For example, diborane (B2H6) and tungsten hexafluoride (WF6) are both critical for manufacturing various types of semiconductor devices such as logic IC, DRAM, 3DNAND memory, flash memory, and more. Because of their critical role, they are expected to see rapid demand increase as fabs ramp up. Some Asian suppliers are now taking the opportunity to fill these supply gaps within the US market.

Disruptions in gas supply from current sources have also heightened the need to bring new gas suppliers into the market. Ukrainian suppliers of crude neon, for example, are currently no longer functional due to the Russia War, and may be out permanently. This has placed a severe constraint on the neon supply chain that will not be alleviated until new supply sources comes online in other regions.

“Helium supply is also at high risk. The US BLM transferring ownership of helium stores and equipment may interrupt supply as equipment may need to be taken offline for maintenance and upgrades,” states Jonas Sundqvist, Senior Analyst at TECHCET. Unfortunately, there has been little to no new helium capacity built over the past year, with the exception of Russia, to make up for future demand growth and any supply chain disruptions. Russia’s capacity continues to be questionable given the war. Additionally, TECHCET is currently anticipating potential shortages for Xe, Kr, NF3, and WF6 over the next few years unless additional capacity is brought on line.

ABOUT TECHCET: TECHCET CA LLC is an advisory services firm expert in market and supply-chain analysis of electronic materials for the semiconductor, display, solar/PV, and LED industries. TECHCET offers consulting, subscription service, and reports, including the Critical Materials Council (CMC) of semiconductor fabricators and Data Subscription Service (DSS). F

Electronic Gases Markets – To Approach a US$9 Billion Market in ‘22

New materials and increasing chip design complexity drives supply-chain problems for Specialty Gases, Rare Gases and Helium

San Diego, CA, June 15, 2022:  TECHCET—the electronic materials advisory firm providing business and technology information— reports that the Electronic Gases market revenues hit US$6.3 billion in 2021 and is forecasted to grow to 8% in 2022. In its recently completed Electronic Gases Report , TECHCET forecasts the 2022 Electronic Gases market will reach almost US$6.8 billion—growth primarily attributed to Specialty Gases. As leading-logic and new generations of memory continue to ramp, Specialty Gases consumed in etching, deposition, chamber cleaning, and other applications remain in strong demand. This segment is forecasted to increase by 10% in 2022 with ~9% CAGR through to 2026, as indicated in TECHCET’s newly released 2022 Critical Materials Report™ on Electronic Gases, authored by Jonas Sundqvist, PhD.

In the near-term, there are supply issues for key industry gases, such as helium and neon; and in the longer term, the supply/demand balance for gases such as nitrogen trifluoride (NF3), tungsten hexafluoride (WF6), and others could tighten as industry demand grows.

Neon supply capacity is at risk due to the Russian invasion of Ukraine. Some gas supply from these sources may be at a permanent loss. Helium supply-chain disruptions stemming from lack of Russian supply availability are starting to have an impact on the semiconductor industry. Russia’s current export ban on helium and rare gases will prolong the supply-chain issues with Helium and rare gases like Neon. The war is only part of the helium supply issue – maintenance problems, delayed product availability, and production disruptions in other helium producing regions are all adding to the tightness in the supply chain.

As new semiconductor device fabs come online globally over the next several years, supply constraints may appear for other gases (B2H6, WF6, NF3, CF-gases) since demand increases are expected to outpace supply. With semiconductor manufacturers increasing fab production capacity, the demand for diborane (B2H6) material is rapidly increasing as it is critical in many device applications such as in doped carbon hard masks.

As more CVD/ALD deposition process passes are added for multi-patterning and EUV-lithography, cleaning demand is increasing, thus we anticipate huge growth in NF3 (used for chamber cleaning). With the current projections, demand may outrun supply causing tightness in NF3 availability come 2025-2026. Similarly, TECHCET estimates there may be supply issues with WF6 around 2025-2026. However, the possibility of molybdenum (Mo) replacing tungsten (W) for memory applications could circumvent any WF6 shortage. WF6 demand is primarily driven by vertical scaling in 3DNAND to higher layer counts, though new interconnect materials could lessen any future supply/demand imbalance.

Among the sources of electronic gases highlighted in TECHCET’s CMR are Air Products, Air Liquide, EMD / Merck, Linde, Matheson Gas, SK Materials, Gazprom, Huate Gas, Peric, and many others.

ABOUT TECHCET:  TECHCET CA LLC is an advisory services firm focused on process materials supply-chains, electronic materials business, and materials market analysis for the semiconductor, display, solar/PV, and LED industries. Since 2000, the company has been responsible for producing the Critical Material Reports™, covering silicon wafers, semiconductor gases, wet chemicals, CMP consumables, Photoresists, and ALD/CVD Precursors.