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CMP 소모품 시장 조사 2023년 : 슬러리와 패드

출판 : TECHCET   출판년월 : 2023년05월

CMP CONSUMABLES – SLURRY and PAD MARKETS
CMP 소모품 시장 조사 2023년 : 슬러리와 패드

구성 영문조사보고서
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리포트목차    주문/문의    납기/라이센스안내

Techcet「CMP 소모품 시장 조사 2023년: 슬러리와 패드 – CMP CONSUMABLES – SLURRY and PAD MARKETS」는 반도체 디바이스 제조에 사용되는 CMP 소모품 중, 슬러리와 패드 시장을 조사·분석해, 기술 관련 정보나 기업 정보를 게재하고 있습니다.

이 보고서의 특징

  • 시장 역학 일반 정보
  • 공급 사슬 관리자, 생산 통합, R&D 관리자, 비즈니스 개발, 재무 분석가에 대한 정보
  • 반도체 디바이스 제조에 사용되는 CMP 패드, 슬러리, 디스크와 관련된 공급망, 시장 및 기술 동향에 대한 정보
  • 주요 공급업체, 재료 공급 문제/동향, 공급업체 시장 점유율 평가, 재료 시장 예측

주요 게시물

  1. 이그제큐티브 요약
  2. 조사 범위, 목표, 방법론
  3. 반도체 산업의 시장 상황과 전망
    1. 세계 경제
    2. 전자 제품 세그먼트별 칩 판매
    3. 반도체 제조 성장 및 확대
    4. 정책 및 무역 동향 및 영향
    5. 반도체 재료 전망
  4. CMP 소모품 시장 동향
    1. CMP 소모품 시장 동향
    2. 기술적 촉진요인 / 재료의 변화와 변천
    3. 화합물 반도체의 기술 동향
    4. 지역별 동향
    5. EHS와 물류 문제
  5. CMP 슬러리 공급업체 시장
    1. CMP 슬러리 수익 5년 예측
    2. SMP 슬러리 수의 5년 예측
    3. CU BPR(BURIED POWER RAIL) 슬러리 시장
    4. CMP 슬러리 M&A, 발표, 제휴 관계
    5. CMP 슬러리 공장 폐쇄
    6. 신규 진입 기업
    7. 존속 위기에 처한 공급업체 또는 부품/생산 라인
    8. CMP 슬러리 가격 동향
    9. TECHCET 분석가의 CMP 슬러리 시장 평가
  6. CMP 패드 시장 통계 데이터 및 예측
    1. CMP 패드 수익 5년 예측
    2. CMP 패드 수의 5년 예측
    3. CMP 패드 공장 폐쇄
    4. 신규 진입 기업
    5. 존속 위기에 처한 공급업체 또는 부품/생산 라인
    6. CMP 패드 M&A, 발표, 제휴 관계
    7. CMP 패드 가격 동향
    8. TECHCET 분석가의 평가
  7. 재료의 하위층 공급
  8. 공급업체 정보
  9. 별표

Description

This report covers the CMP Consumables market (specifically CMP slurry and pads) and supply-chain for those consumables used in semiconductor device fabrication. The report contains data and analysis from TECHCET’s data base and Sr. Analyst experience, as well as that developed from primary and secondary market research. CMP slurries and pads are a critical in semiconductor manufacturing as process integration requires the fabrication of thin and uniformly flat layers to build up device structures across the semiconductor wafers. The number of CMP process steps continue to increase with each generation of new device technology.​ New device technology is characterized by more layers, new materials, tighter process control requirements, and new techniques for advanced packaging. These manufacturing challenges require new developments in CMP slurries and pads. This report looks at the market drivers, slurry and pad forecasts by application, market shares, abrasive suppliers, and includes a special focus on advanced packaging.​

Analyst

Sarah Okada

Sarah Okada joined TECHCET as a senior market analyst in January 2021

Ms. Okada has worked in leadership roles in the semiconductor industry for over 25 years focusing on product management, marketing and technical sales of substrate and device manufacturing equipment.

Ms. Okada started in the semiconductor industry in 1995 in the applications development group at Strasbaugh, a supplier of CMP and grinding equipment.

In 2013, she was promoted to director of sales and marketing for Strasbaugh where she incorporated marketing and sales best practices to develop a new brand for Strasbaugh and launched a successful new HVM grinding product.

Ms. Okada was key in the acquisition of Strasbaugh’s technology for Revasum in 2016, where she served as VP of marketing and product management and launched the industry’s first fully automated SiC substrate polisher.

Since joining Nova in November 2020, Ms. Okada has been leading work on the SIMS-based METRION platform and was recently promoted to product marketing director

Ms Okada holds a bachelor’s degree in Marketing and Finance from the University of Oregon.


목차

1 EXECUTIVE SUMMARY 9

1.1 CMP CONSUMABLES MARKET OVERVIEW 10
1.2 CMP CONSUMABLES REVENUE TRENDS 11
1.3 MARKET TRENDS IMPACTING CMP CONSUMABLES OUTLOOK 12
1.4 YEAR 2022 IN REVIEW 13
1.5 CMP CONSUMABLES FORECASTS BY MATERIAL SEGMENT 14
1.5.1 CMP SLURRIES 5-YEAR REVENUE FORECAST 15
1.5.2 CMP PADS 5-YEAR REVENUE FORECAST 16
1.6 TECHNOLOGY TRENDS 17
1.6.1 BACKSIDE TECHNOLOGY TRENDS 18
1.7 SLURRY SUPPLIER COMPETITIVE LANDSCAPE 19
1.8 PAD SUPPLIER COMPETITIVE LANDSCAPE 20
1.9 ANALYST ASSESSMENT 21
1.9.1 ANALYST ASSESSMENT, CONTINUED 22

2 SCOPE, PURPOSE AND METHODOLOGY 23

2.1 SCOPE 24
2.2 PURPOSE 25
2.3 METHODOLOGY 26
2.4 OVERVIEW OF OTHER TECHCET CMR™ REPORTS 27

3 SEMICONDUCTOR INDUSTRY MARKET STATUS & OUTLOOK 28

3.1 WORLDWIDE ECONOMY 29
3.1.1 SEMICONDUCTOR INDUSTRIES TIES TO THE GLOBAL ECONOMY 31
3.1.2 SEMICONDUCTOR SALES GROWTH 32
3.1.3 TAIWAN MONTHLY SALES TRENDS 33
3.1.4 UNCERTAINTY ABOUNDS ESPECIALLY FOR 2023 – SLOWER TO NEGATIVE SEMICONDUCTOR REVENUE GROWTH EXPECTED 34
3.2 CHIPS SALES BY ELECTRONIC GOODS SEGMENT 35
3.2.1 SMARTPHONES 36
3.2.2 PC UNIT SHIPMENTS 37
3.2.3 SERVERS / IT MARKET 40
3.3 SEMICONDUCTOR FABRICATION GROWTH & EXPANSION 41
3.3.1 FAB EXPANSION ANNOUNCEMENT SUMMARY 42
3.3.2 WW FAB EXPANSION DRIVING GROWTH 44
3.3.3 EQUIPMENT SPENDING TRENDS 45
3.3.4 TECHNOLOGY ROADMAPS 46
3.3.5 FAB INVESTMENT ASSESSMENT 47
3.4 POLICY & TRADE TRENDS AND IMPACT 48
3.5 SEMICONDUCTOR MATERIALS OVERVIEW 49
3.5.1 COULD MATERIALS CAPACITY LIMIT CHIP PRODUCTION SCHEDULES? 50
3.5.2 LOGISTICS ISSUES EASED DOWN 51
3.5.3 TECHCET WAFER STARTS FORECAST THROUGH 2027 52
3.5.4 TECHCET’S MATERIAL FORECAST 53

4 CMP CONSUMABLES MARKET TRENDS 54

4.1 CMP CONSUMABLES MARKET TRENDS 55
4.2 TECHNICAL DRIVERS / MATERIAL CHANGES AND TRANSITIONS 56
4.2.1 3D NAND ROADMAP 58
4.2.2 3D NAND STACKING 59
4.2.3 TECHNICAL TRENDS IN ADVANCED PACKAGING 60
4.2.4 CMP FOR TSV 62
4.3 TECHNICAL TRENDS IN COMPOUND SEMICONDUCTOR 63
4.3.1 CMP OF SILICON CARBIDE 64
4.3.2 SILICON CARBIDE DEFECTS 65
4.3.3 CMP CHALLENGES IN SILICON CARBIDE 66
4.4 REGIONAL TRENDS 67
4.4.1 REGIONAL TRENDS AND DRIVERS 68
4.4.2 REGIONAL TRENDS AND DRIVERS, CONTINUED 69
4.5 EHS AND LOGISTIC ISSUES 70
4.5.1 EHS ISSUES FOR NEW MATERIALS 71
4.5.2 LOGISTIC ISSUES 72
4.5.3 EHS ISSUES FOR SLURRY DISPOSAL, RECYCLING AND RECLAIM 73

5 CMP SLURRY SUPPLIER MARKET SHARES 74

5.1 CMP SLURRIES 5-YEAR REVENUE FORECAST 75
5.2 CMP SLURRIES 5-YEAR FORECAST BY UNITS 76
5.3 CMP SLURRY MARKET LEADERS 77
5.3.1 TOTAL SLURRY MARKET SHARE 78
5.3.2 OXIDE (CERIA) SLURRY MARKET 79
5.3.3 HKMG SLURRY MARKET 81
5.3.4 POLYSILICON SLURRY MARKET 83
5.3.5 OXIDE (SILICA) SLURRY MARKET 85
5.3.6 TUNGSTEN SLURRY MARKET 86
5.3.7 CU BULK SLURRY MARKET 87
5.3.8 COPPER BARRIER SLURRY MARKET 88
5.3.9 NEW METALS SLURRY MARKET 90
5.3.10 CU BURIED POWER RAIL (BPR) SLURRY MARKET 91
5.4 CMP SLURRY M&A ACTIVITY, ANNOUNCEMENTS AND PARTNERSHIPS 92
5.5 CMP SLURRY PLANT CLOSURES 93
5.6 NEW ENTRANTS 94
5.7 SUPPLIERS OR PARTS/PRODUCT LINE THAT ARE AT RISK OF DISCONTINUATIONS 95
5.8 CMP SLURRY PRICING TRENDS 96
5.9 TECHCET ANALYST ASSESSMENT OF CMP SLURRY MARKET 97

6 CMP PAD MARKET STATISTICS & FORECASTS 98

6.1 CMP PADS 5-YEAR REVENUE FORECAST 99
6.1.1 CMP PADS 5-YEAR REVENUE FORECAST 100
6.2 CMP PADS 5-YEAR FORECAST BY UNITS 101
6.3 CMP PAD PLANT CLOSURES 102
6.4 NEW ENTRANTS 103
6.5 SUPPLIERS OR PARTS/PRODUCT LINE THAT ARE AT RISK OF DISCONTINUATIONS 104
6.6 CMP PAD M&A ACTIVITY, ANNOUNCEMENTS AND PARTNERSHIPS 105
6.7 CMP PAD PRICING TRENDS 106
6.8 TECHCET ANALYST ASSESSMENT 107
6.8 TECHCET ANALYST ASSESSMENT, CONTINUED 108

7 MATERIAL SUB-TIER SUPPLY 109

7.1 ABRASIVE SUPPLIERS 110
7.2 VERTICALLY INTEGRATED SUPPLIERS 111
7.3 RAW SUPPLY CHAIN DISRUPTORS 112
7.4 RAW MATERIALS M&A ACTIVITY 113
7.5 ABRASIVE SUPPLY-CHAIN EHS AND LOGISTICS ISSUES 114
7.6 ABRASIVE SUPPLY CHAIN “NEW” ENTRANTS 115
7.7 ABRASIVE SUPPLY-CHAIN PLANTS UPDATES-NEW 116
7.8 ABRASIVE SUPPLY-CHAIN PLANT CLOSURES 117
7.9 ABRASIVE SUPPLY-CHAIN PRICING TRENDS 118
7.10 SUB-TIER SUPPLY-CHAIN TECHCET ANALYST ASSESSMENT 119

8 SUPPLIER PROFILES 120

NANOPHASE TECHNOLOGIES CORPORATION 3M COMPANY
ABRASIVE TECHNOLOGY
ACE NANOCHEM
ANJI MICRO SHANGHAI
ASAHI GLASS
…and 20+ more

9 APPENDIX 329

APPENDIX A: CMP CONSUMABLES OVERVIEW 330
APPENDIX B: TECHNICAL TRENDS IN SIC 332
APPENDIX C: PAD MANUFACTURING COST DRIVERS 338

FIGURES

FIGURE1: FORECASTED 2023 MARKET SIZE 10
FIGURE 2: CMP CONSUMABLES FORECAST 11
FIGURE 3: CMP STEPS FOR ADVANCED DEVICES 12
FIGURE 4: 2022 CMP CONSUMABLES REVENUE 13
FIGURE 5: CMP CONSUMABLES REVENUE BY APPLICATION 14
FIGURE 6: CMP SLURRY REVENUE BY APPLICATION 15
FIGURE 7: CMP PAD REVENUE BY APPLICATION 16
FIGURE 8: CMOS TECHNOLOGY ROADMAP 17
FIGURE 9: LIMITATIONS OF FS-PDN 18
FIGURE 10: 2D DEVICE ARCHITECTURE EVOLUTION 18
FIGURE 11: 2022 SLURRY SUPPLIER MARKET SHARES 19
FIGURE 12: 2022 PAD SUPPLIER MARKET SHARES 20
FIGURE 13: GLOBAL ECONOMY AND THE ELECTRONICS SUPPLY CHAIN (2022) 31
FIGURE 14: WORLDWIDE SEMICONDUCTOR SALES 32
FIGURE 15: TECHCET’S TAIWAN SEMICONDUCTOR INDUSTRY INDEX (TTSI)* 33
FIGURE 16: 2023 SEMICONDUCTOR INDUSTRY REVENUE GROWTH FORECASTS 34
FIGURE 17: 2022 SEMICONDUCTOR CHIP APPLICATIONS 35
FIGURE 18: MOBILE PHONE SHIPMENTS WW ESTIMATES 36
FIGURE 19: WORLDWIDE PC AND TABLET FORECAST 37
FIGURE 20: ELECTRIFICATION TREND BY WORLD REGION 38
FIGURE 21: SEMICONDUCTOR AUTOMOTIVE PRODUCTION 39
FIGURE 22: TSMC PHOENIX INVESTMENT ESTIMATED WILL BE US $40 B 41
FIGURE 23: CHIP EXPANSIONS 2022-2027 US$366 B 42
FIGURE 24: SEMICONDUCTOR CHIP MANUFACTURING REGIONS OF THE WORLD 44
FIGURE 25: GLOBAL TOTAL EQUIPMENT SPENDING BY SEGMENT (US$ B) 45
FIGURE 26: OVERVIEW OF ADVANCED LOGIC DEVICE TECHNOLOGY ROADMAP 46
FIGURE 27: INTEL OHIO PLANT SITE FEB. 2023 AND ARTIST RENDERING (ON BOTTOM) 47
FIGURE 28: EUROPE CHIP EXPANSION UPSIDE 50
FIGURE 29: PORT OF LA 51
FIGURE 30: TECHCET WAFER START FORECAST BY NODE SEGMENTS** 52
FIGURE 31: GLOBAL SEMICONDUCTOR MATERIALS OUTLOOK 53
FIGURE 32: CMP CONSUMABLES REVENUE FOR 2022 55
FIGURE 33: NUMBER OF CMP STEPS FOR ADVANCED TECHNOLOGY NODES 56
FIGURE 34: COMPARISON OF METALS RESISTIVITIES BY DIMENSION 57
FIGURE 35: 14NM VS. 7NM METALLIZATION TECHNIQUES 57
FIGURE 36: 3D NAND ROADMAP BY NODE 58
FIGURE 37: STACKING FOR 3D NAND 59
FIGURE 38: CMP OPPORTUNITIES IN ADVANCED PACKAGING 60
FIGURE 39: KEY TRENDS IN ADVANCED PACKAGING 61
FIGURE 40: CMP OPPORTUNITIES IN ADVANCED PACKAGING 62
FIGURE 41: SILICON CARBIDE-BASED POWER DEVICE 64
FIGURE 42: DEFECTS IN SILICON CARBIDE SUBSTRATES AND EPI WAFERS 65
FIGURE 43: SILICON CARBIDE DEFECTS 65
FIGURE 44: BATCH POLISH VS. CMP 66
FIGURE 45: SLURRY AND PAD REVENUE BY HQ REGION 67
FIGURE 46: CMP SLURRY REVENUE BY APPLICATION 75
FIGURE 47: FORECASTED SLURRY VOLUME DEMAND 76
FIGURE 48: SLURRY SUPPLIER MARKET SHARES IN 2022 78
FIGURE 49: OXIDE (CERIA) SLURRY MARKET SHARES 79
FIGURE 50: STI CMP PROCESS 80
FIGURE 51: HKMG/FRONT-END SLURRY MARKET SHARES 81
FIGURE 52: POLYSILICON SLURRY MARKET SHARES 83
FIGURE 53: MEMS CMP CROSS SECTION 84
FIGURE 54: OXIDE (SILICA) SLURRY MARKET SHARES 85
FIGURE 55: TUNGSTEN SLURRY MARKET SHARES 86
FIGURE 56: CU-BULK SLURRY MARKET SHARES 87
FIGURE 57: CU-BARRIER CMP SLURRY MARKET SHARE 88
FIGURE 58: NEW METALS SLURRY MARKET SHARES 90
FIGURE 59: CU BPR SLURRY MARKET SHARES 91
FIGURE 60: CMP PAD REVENUE BY APPLICATION 99
FIGURE 61: CMP PAD REVENUE BY WAFER SIZE 100
FIGURE 62: FORECASTED PAD USAGE 101
FIGURE 63: CMP FOR IC MANUFACTURING PROCESS 331
FIGURE 64: IC1000 LIKE PAD CROSS-SECTION 340
FIGURE 65: IC1000 SEM CROSS-SECTION 341

TABLES

TABLE 1: GLOBAL GDP AND SEMICONDUCTOR REVENUES* 29
TABLE 2: IMF ECONOMIC OUTLOOK* 30
TABLE 3: DATA CENTER SYSTEMS AND COMMUNICATION SERVICES MARKET SPENDING 2022 40
TABLE 4 & 5: SILICON CARBIDE WAFER MANUFACTURERS AND CONSUMABLES SUPPLIERS 63
TABLE 6: REGIONAL WAFER MARKETS 68
TABLE 7: REGIONAL WAFER MARKETS BY SUPPLIER HEADQUARTER REGION 69
TABLE 8: 2022 SLURRY MARKET LEADERS AND TAM BY APPLICATION 77
TABLE 9: PAD SUPPLIERS 108
TABLE 10: ABRASIVE SUPPLIERS 110
TABLE 11: VERTICALLY INTEGRATED SUPPLIERS 111
TABLE 12: PHYSICAL AND ELECTRICAL PROPERTY COMPARISON OF SI AND SIC 333


[보도자료] CMP Consumables Facing Market Correction after Strong 2022

June 6, 2023
Advance logic developments drive new CMP consumables opportunities

San Diego, CA, June 6, 2023: TECHCET — the electronic materials advisory firm providing business and technology information on semiconductor supply chains — is forecasting a -2.4% reduction in the 2023 CMP Consumables market composed of pads and slurry following strong performance in 2022. This slight drop is the result of an oversupply in DRAM and general corrections within the market. Despite the drop, the CMP Consumables market is expecting an overall upward 5-year CAGR of 5.2%, as mentioned in the the newly released CMP Consumables Critical Materials Report™. During this period, CMP Consumables for copper, tungsten, and oxides will continue to represent most of the market. The largest growth rate in demand over the next 5 years is expected for new metals (Co, Mo, and Ru) pads and slurry combined.

CMP CONSUMABLES – SLURRY and PAD MARKETS CMP 소모품 시장 조사 2023년 : 슬러리와 패드

Developments in new methodologies like GAA/Nanosheet, ForkSheet in logic are driving a new set of challenges for thinner layers and better thickness control. Additionally, new BEOL materials, such as cobalt, ruthenium, molybdenum are being evaluated to replace W and some minimum dimension Cu interconnects levels. Because of this, new CMP consumables are required to process these materials.

Device makers are continuing to look for ways to reduce consumables costs. In the current market climate with high inflation rates and the high degree of customization, there is little chance that prices will go down. Possible supply chain disruptions due to geopolitical events in China and Russia could also cause delays and price increases as suppliers work to qualify alternate sources of supply for raw materials that they were importing from these countries. Despite these hurdles, there could be an upside for CMP consumable suppliers as “local” equipment suppliers gain traction since they will need to develop process recipes, which could result in an increase in consumables demand.

For more details on the CMP Consumables market segment and growth trajectory, including profiles on suppliers like 3M Company, Anji Micro, Asahi Glass, Ace Nanochem, JSR, Fujifilm, EMD Electronics, DuPont and more, go to:

CMP Slurry & Pads Market Report CMR 2023-2024 (Single User License)

ABOUT TECHCET: TECHCET CA LLC is an advisory services firm expert in market and supply-chain analysis of electronic materials for the semiconductor, display, solar/PV, and LED industries. TECHCET offers consulting, subscription service, and reports, including the Critical Materials Council (CMC) of semiconductor fabricators and Data Subscription Service (DSS). F


CMP 소모품 공급이 가까워지고 비용이 증가 할 것으로 예상됩니다.

가슈 샌디에고, 2022년 5월 24일

전자재료 사업 및 기술정보를 제공하는 권고사인 TECHCET은 반도체용 화학기계평탄화(CMP) 소모품 시장이 2021년 30억 달러에 달해 약 13%로 성장했다고 발표했다. CMP 시장은 슬러리와 패드 시장이 2022년 33억 달러, 9%로 성장했으며, 2026년까지는 연평균 성장률(CAGR) 6% 이상의 성장을 이룰 것으로 예측되고 있다.

CMP CONSUMABLES – SLURRY and PAD MARKETS CMP 소모품 시장 조사 2023년 : 슬러리와 패드

첨단 장치는 생산을 강화하고 CMP 가공은 계속 증가하고 있습니다. 로직 시장에서는 CMP 절차와 금속 게이트를 위한 신규 재료의 도입이 증가하고 FinFET에서 GAA의 전환이 일어나고 있다는 것이 TECHCET의 CMP 소모품에 관한 조사 보고서에서 지적되고 있습니다. 코발트, 루테늄, 몰리브덴, 니켈 및 다양한 합금이 고려 범위로 언급됩니다. 텅스텐, 구리, 코발트 패드 및 슬러리의 수요는 첨단 DRAM과 3DNAND가 뒷받침하고 있습니다. 또 웨이퍼의 상위 계층형의 생산 강화가 개시됨으로써, 선진 3DNAND도 성장 촉진 요인이 되고 있습니다.

산화물이나 텅스텐 등의 재료에 공통으로 사용되는 슬러리와 패드는 입수할 수 있지만, 종래품용 소모품에 대한 수요는 계속 낮아질 것으로 보입니다. 새로운 재료가 기존 제품에 사용되는 것을 대체함으로써 공급 업체의 일부는 기존의 소모품 생산 라인을 중지하고 기존 재료에 대한 소모품의 입수량을 줄일 것입니다. 이로 인해 경쟁이 완화되고 기존 CMP 제품의 가격이 매달릴 수 있습니다.

슬러리 가격, 특히 특수 슬러리와 소구 주문분은 향후 1~2년 이상은 유지 혹은 가격 인상이 예측되고 있습니다. 나노세리아 슬러리에 대해서는 표면성상의 개선과 결함제어의 필요성이 촉진요인이 되어 수요가 증가하고 있다.

패드 시장의 경쟁 감소로 패드 가격에 움직임은 보이지 않을 것이다. 소량 주문은 특별 가격이 될 것입니다. 그러나 중국에서 패드 공급업체가 신규 진입하면 중국 국내에서 지위를 확립하여 중국에서 경쟁사의 패드 가격 인하로 이어질 수 있다.

(원문) CMP Consumables – Supply is Tight and Costs Expected to Rise

as legacy products are replaced by leading edge

San Diego, CA, May 24, 2022: TECHCET—the electronic materials advisory firm providing business and technology information— announced the Chemical Mechanical Planarization (CMP) consumables market for semiconductors grew almost 13% in 2021 to reach US$3.0 billion. The CMP market, including both slurries and pads, will grow almost 9% in 2022 to US$3.3 billion, and the forecast through 2026 shows this market growing at over a 6% CAGR.

CMP processes continue to increase as leading-edge devices ramp up in production. The logic market is seeing a shift from FinFET to GAA, which increases the number of CMP steps and the introduction of new materials for the metal gate, as indicated in “TECHCET’s 2022 Critical Materials Report™ on CMP Consumables.” Under consideration are cobalt, ruthenium, molybdenum, nickel, and various alloys. Strong growth in leading edge DRAM and 3DNAND is boosting demand for tungsten, copper and cobalt pads and slurries. Growth is also driven by advanced 3DNAND as wafer starts for higher layer generations ramp up in production.

Demand will continue to slow for consumables for legacy products, though slurries and pads for commonly used materials, such as oxide and tungsten, will continue to be available. As new materials replace those used in legacy products, availability of consumables for the legacy materials will decrease as some suppliers will discontinue their consumables legacy product lines. This will result in less competition and will likely drive-up prices for legacy CMP products.

Slurry prices are expected to hold or increase, particularly on specialty slurries and on small quantity orders over the next year or two. Nanoceria slurries are in growing demand, driven by the need for improved surface quality and defectivity control.

Due to the lack of competition in the pad market, pad prices will hold firm. Small quantity orders will receive a premium price. However, if the new pad supplier entrants in China gain position in the local market, it could soften prices for competitive pads in China.


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