Dielectric Precursors – 유전체 전구체 보고서

출판 : Techcet 출판년월 : 2021년06월

Dielectric Precursors
Techcet 출판 본 조사 보고서는 절연 전구체 시장을 조사 · 분석하고 있습니다. 또한 재료 공급망에있어서의 과제와 동향, 공급 업체의 시장 점유율에 대한 평가 자료 세그먼트 예측 등 절연 전구체 관련 주요 공급 업체 정보를 제공합니다.

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Overview

  • Provides market and technical trend information on organic and inorganic precursors, addressing CVD, ALD, and SOD applications including ILDs & low-κ dielectrics, hard masks, sidewall spacers and etch stop layers
  • Provides focused information for supply-chain managers, process integration and R&D directors, as well as business development and financial analysts
  • Covers information about key suppliers, issues/trends in the material supply chain, estimates on supplier market share, and forecast for the material segments

  • ILD & 낮은 κ 유전체, 하드 마스크, 측벽 스페이서 및 에칭 정지 레이어
  • 공급망 관리자, 프로세스 통합 및 R&D 이사, 비즈니스 개발 및 재무 분석가를 위한 집중 정보 제공
  • 주요 공급업체에 대한 정보, 자재 공급망의 문제/동향, 공급업체 시장 점유율 추정 및 자재 부문 예측

 


목차

1 Executive Summary 20

1.1 Precursors Market Forecasts & 5-Year CAGRs 20
1.2 Technical Drivers/Material Changes and Transitions 23
1.3 Leading Edge Logic 23
1.4 EQUIPMENT Market Trends 23
1.5 Analyst Assessment 27
1.6 Opportunities for Suppliers 30

2 Scope, Purpose, and Methodology 31

2.1 Scope 31
2.2 Purpose 31
2.3 Methodology 31
2.4 Overview of Other TECHCET CMR? Reports 32

3 Market outlook 33

3.1 Semiconductor Industry Market Status & Outlook 33
3.2 Global Economy 33
3.2.1 Semiconductor Industries Ties to the Global Economy 34
3.2.2 Semiconductor Sales Growth 35
3.2.3 Taiwan Monthly Sales Trends 36
3.2.4 Semiconductor Industry Outlook 36
3.2.5 Semiconductor Units and Wafer Shipment Growth Forecast 37
3.3 Electronic Goods Market 38
3.3.1 Smartphones 38
3.3.2 PC Unit Shipments 39
3.4 Automotive Sales 40
3.4.1 Automotive Sales and Impact on Semiconductor Sales 40
3.4.2 Electric Vehicle (EV) Market Trends 41
3.4.3 Increase in Semiconductor Content for Autos 42
3.4.4 Semiconductor Content by Automotive Electronic System 43
3.4.5 Servers / IT 43
3.5 Semiconductor Fabrication Growth & Expansion 44
3.5.1 Equipment Spending Trends 44
3.5.2 Overall China Market Trends 47
3.5.3 Policy & Trade Trends and Impact 49
3.5.4 Policy and Trade Issues 49
3.5.5 U.S. CHIPS Act 50
3.5.6 Other Semiconductor Funding Activity 51
3.6 Semiconductor Materials Outlook 51
3.6.1 Wafer Start Growth 52
3.6.2 Materials Forecast 53

4 Semiconductor precursors market trends 55

4.1 Advanced dielectric and spin on Dielectric precursors 56
4.2 Sub-Tier Material Trends 57
4.3 Technical Drivers / Material Changes and Transitions 59
4.4 Leading-Edge Logic 59
4.5 DRAM 64
4.6 3DNAND 66
4.7 Emerging Memory Devices 68
4.8 China Status in Memory and Logic 69
4.9 Trends/impact/status of legacy materials 70
4.9.1 Comment on Regional Trends/Drivers 72
4.10 EHS and Logistic Issues 73
4.10.1 Tungsten 73
4.10.2 Titanium 74
4.10.3 Zirconium and Hafnium 74
4.10.4 Cobalt 75
4.10.5 Ruthenium 76
4.10.6 Logic Production Energy demand and
Green House Gas emissions 76
4.10.7 Changes in standard packaging/valve types 78
4.11 CVD / ALD Equipment 79
4.12 Literature review and IP filing for new metallization – Mo and Ru 85

5 Precursors Market Forecast & Market Shares 62

5.1 Fab Material Supply/Demand -Dielectric Precursors 91
5.1.1 Dielectric Precursors – Market Forecast 92
5.1.2 Dielectrics Precursors Market Shares 93
5.1.1 Dielectrics Precursors Regional Shares 94
5.2 M&A Activity 95
5.2.1 Summary of recent M&A´s 95
5.2.2 Impact of M&A on market leaders 96
5.2.3 Linde-Praxair 96
5.2.4 Versum Materials takeover deal by Merck KGaA 97
5.2.5 2021 – Ascensus acquires a global leader in high-purity specialty chemicals and CVD/ALD precursors Strem Chemicals, Inc.Passt M&A 98
5.2.6 Mitsubishi Chemical America Inc. takeover of Gelest Inc. 98
5.2.7 2018/2019 – MPD Chemicals acquires Norquay Technology and then gets acquired by Entegris in addition
to previously buying DSC. 99
5.2.8 OEM M&A activity in the CVD and ALD Segment 99
5.2.8.1 Applied Materials Kokusai takeover 99
5.3 Regional Market Dynamics – New Plants or Entrants 100
5.3.1 South Korea 100
5.3.2 Taiwan 100
5.3.3 USA 101
5.4 EU and The UK 101
5.5 Plant Closures and Product Discontinuations 101
5.6 New Entrants- no new entrants 101
5.7 Suppliers or parts/product line that is at risk of discontinuations – none to report at this time 101
5.8 Pricing Trends 101

6 SUB TIER MATERIAL SUPPLY CHAIN 103

6.1 Raw Material Sources 103
6.2 Raw Supply Chain Disruptions 103
6.2.1 COVID-19 105
6.3 M&A Activity 106
6.4 Raw Material EHS and Logistics Issues 106
6.5 New entrants 106

7 Supplier profiles 107

7.1. ADEKA Corporation 107
7.1.1 ADEKA CORPORATION – Company Overview 107
7.1.2 ADEKA CORPORATION -Business Segments 108
7.1.3 ADEKA CORPORATION – News 109
7.1.4 ADEKA CORPORATION – Regions Served 111
7.1.5 ADEKA CORPORATION – Key Customers 111
7.1.6 ADEKA CORPORATION – Financial Overview 111
7.1.7 ADEKA CORPORATION – Manufacturing Locations, Capabilities, and Certifications 112
7.1.8 Sales Reps and Distributors 113
7.1.9 TECHCET Analyst Assessment 114
7.2. Air Liquide (Maker, Purifier, Supplier) 114
7.2.1 Air Liquide – Company Overview 114
7.2.2 Air Liquide – Business Segments 115
7.2.3 Air Liquide – News 115
7.2.4 Air Liquide – Financial Overview 115
7.2.5 Air Liquide – Manufacturing Locations, Capabilities, and Certifications 116
7.2.6 JVs and Partnerships 117
7.2.7 Sales Reps 117
7.2.8 TECHCET Analyst Assessment 117
7.3. AZmax Co., Ltd 118
7.3.1 AZmax Co., Ltd. – Company Overview 118
7.3.2 AZmax Co., Ltd.-Business Segments 118
7.3.3 Azmax Co., Ltd. – Regions Served 119
7.3.4 Azmax Co., Ltd.- Fiscal Year Financial Overview 119
7.3.5 AZmax Co., Ltd.- Manufacturing Locations,
Capabilities, and Certifications 119
7.3.6 JVs and Partnerships 119
7.3.7 Sales Reps and Distributors 119
7.3.8 TECHCET Analyst Assessment 119
7.4. DNF Co., Ltd 120
7.4.1 DNF Co., Ltd – Company Overview 120
7.4.2 DNF Co., Ltd -Business Segments – all electronics materials 120
7.4.3 DNF Co., Ltd -News 121
7.4.4 DNF Co., Ltd -Regions Served 121
7.4.5 DNF Co., Ltd -Key Customers 121
7.4.6 Fiscal Year Financial Overview 121
7.4.7 DNF Co., Ltd -JVs and Partnerships 123
7.4.8 DNF Co., Ltd -Sales Reps and Distributors 123
7.4.9 DNF Co., Ltd -TECHCET Analyst Assessment 123
7.5. Entegris 124
7.5.1 Entegris – Company Overview 124
7.5.2 ENTEGRIS – Business Segments 124
7.5.3 ENTEGRIS- News 126
7.5.4 ENTEGRIS – Regions Served 126
7.5.5 ENTEGRIS- Key Customers 126
7.5.6 ENTEGRIS- Fiscal Year Financial Overview 126
7.5.7 ENTEGRIS- Manufacturing Locations, Capabilities, and Certifications 127
7.5.8 JVs and Partnerships 128
7.5.9 Sales Reps and Distributors 128
7.5.10 TECHCET Analyst Assessment 128
7.6. Epivalence 129
7.6.1 EpiValence Ltd. – Company Overview 129
7.6.2 EpiValence Ltd.-Business Segments 130
7.6.3 EpiValence Ltd.- News 131
7.6.4 EpiValence Ltd.- Regions Served 131
7.6.5 EpiValence Ltd.- Key Customers 131
7.6.6 EpiValence Ltd – Fiscal Year Financial Overview 131
7.6.7 EpiValence Ltd – Manufacturing Locations, Capabilities, and Certifications 132
7.6.8 JVs and Partnerships 132
7.6.9 Sales Reps and Distributors 132
7.6.10 TECHCET Analyst Assessment 132
7.7. Gelest – Mitsubishi Chemicals 132
7.7.1 Gelest Inc. – Company Overview 132
7.7.2 Gelest Inc – Business Segments. 133
7.7.3 Gelest Inc. – News 134
7.7.4 Gelest Inc.- Regions Served 135
7.7.5 Gelest Inc. – Fiscal Year Financial Overview 135
7.7.6 Gelest Inc. – Manufacturing Locations,
Capabilities, and Certifications 135
7.7.7 JVs and Partnerships 136
7.7.8 Sales Reps and Distributors 136
7.7.9 TECHCET Analyst Assessment 137
7.8. Hansol Chemical 137
7.8.1 Hansol Chemical – Company Overview 137
7.8.2 Hansol Chemical – Business Segments 138
7.8.3 Hansol ALD/CVD Products 138
7.8.4 Hansol Chemical – News 138
7.8.5 Hansol Chemical – Regions Served 139
7.8.6 Hansol Chemical – Key Customers 139
7.8.7 Hansol Chemical – Fiscal Year Financial Overview 140
7.8.8 Hansol Chemical – Manufacturing Locations, Capabilities, and Certifications 140
7.8.9 Hansol Chemical – JVs and Partnerships 141
7.8.10 Hansol Chemical- Sales Reps and Distributors 141
7.8.11 TECHCET Analyst Assessment 142
7.9. H.C. Starck (sub-tier supplier) 142
7.9.1 HC Stark-Company Overview 142
7.9.2 HC Stark -Business Segments 143
7.9.3 HC Stark -Recent News 145
7.9.4 HC Stark -Regions Served 146
7.9.5 HC Stark -Financial Overview 146
7.9.6 HC Stark -Manufacturing Locations, Capabilities, and Certifications 146
7.9.7 JVs and Partnerships 147
7.9.8 Sales Reps 148
7.9.9 TECHCET Analyst Assessment 149
7.10. Kojundo Chemical Laboratory 149
7.10.1 Kojundo – Company Overview 149
7.10.2 Kojundo -Business Segments 150
7.10.3 Kojundo – News 152
7.10.4 Kojundo? Regions Served 153
7.10.5 Kojundo – Key Customers 153
7.10.6 Kojundo – Manufacturing Locations, Capabilities, and Certifications 153
7.10.7 TECHCET Analyst Assessment 154
7.11. Linde (Maker, Purifier, Supplier) 154
7.11.1 Linde- Company Overview 154
7.11.2 Linde-Business Segments 156
7.11.3 Linde- News 158
7.11.4 Linde – Key Customers 159
7.11.5 Linde – Regions Served 159
7.11.6 Linde- Fiscal Year Financial Overview 159
7.11.7 Linde- Manufacturing Locations, Capabilities, and Certifications 159
7.11.8 JVs and Partnerships 160
7.11.9 Sales Reps and Distributors – Linde 161
7.11.10 TECHCET Analyst Assessment 161
7.12. Mecaro 162
7.12.1 Mecaro- Company Overview 162
7.12.2 Business Segments 162
7.12.3 News 163
7.12.4 Regions Served 163
7.12.5 Key Customers 163
7.12.6 Fiscal Year Financial Overview (KRW) 164
7.12.7 Manufacturing Locations, Capabilities, and Certifications 164
7.12.8 JVs and Partnerships 166
7.12.9 Sales Reps and Distributors 167
7.12.10 TECHCET Analyst Assessment 167
7.13. EMD Electronics/Merck EMD (for old profile Versum products see Sec.26) 168
7.13.1 Merck KGaA / EMD- Company Overview 168
7.13.2 Merck KGaA / EMD – Business Segments 168
7.13.3 Merck KGaA / EMD – Financial Overview 169
7.13.4 Merck KGaA / EMD – News 170
7.13.5 Merck KGaA / EMD – Key Customers 170
7.13.6 Merck KGaA / EMD – Manufacturing Locations, Capabilities, and Certifications 171
7.13.7 JVs and Partnerships 173
7.13.8 Sales Reps and Distributors 173
7.13.9 TECHCET Analyst Assessment 175
7.14. Nanmat 176
7.14.1 Nanmat -Company Overview 176
7.14.2 Nanmat -Business Segments 176
7.14.3 Nanmat – News 177
7.14.4 Nanmat -Regions Served 178
7.14.5 Nanmat -Key Customers 178
7.14.6 Nanmat -Financial Overview 178
7.14.7 Nanmat -Manufacturing Locations, Capabilities, and Certifications 178
7.14.8 Nanmat -JVs and Partnerships 179
7.14.9 Nanmat -Sales Reps 179
7.14.10 Nanmat – TECHCET Analyst Assessment 179
7.15. Norquay (old profile, integrated in MPD and aquired by Entegris) 180
7.15.1 Norquay – Company Overview 180
7.15.2 Norquay – Business Segments 180
7.15.3 Norquay – News 182
7.15.4 Norquay – Manufacturing Locations, Capabilities, and Certifications 183
7.15.5 Norquay – JVs and Partnerships 183
7.15.6 Norquay – Sales Reps 183
7.15.7 Norquay – TECHCET Analyst Assessment 184
7.16. Pegasus Chemicals 184
7.16.1 Pegasus Chemicals – Company Overview 184
7.16.2 Pegasus Chemicals – Business Segments 184
7.16.3 Pegasus Chemicals – News 189
7.16.4 Pegasus Chemicals – Regions Served 190
7.16.5 Pegasus Chemicals – Financial Overview 190
7.16.6 Pegasus Chemicals – Manufacturing Locations, Capabilities, and Certifications 190
7.16.7 Pegasus Chemicals – JVs and Partnerships 190
7.16.8 Pegasus Chemicals – Sales Reps 191
7.16.9 Pegasus Chemicals – TECHCET Analyst Assessment 191
7.17. Soulbrain 191
7.17.1 Soulbrain- Company Overview 191
7.17.2 Soulbrain -Business Segments 192
7.17.3 Soulbrain -News 193
7.17.4 Soulbrain -Regions Served 194
7.17.5 Soulbrain -Key Customers 194
7.17.6 Fiscal Year Financial Overview 194
7.17.7 Soulbrain -Manufacturing Locations, Capabilities, and Certifications 194
7.17.8 Soulbrain -JVs and Partnerships 195
7.17.9 Soulbrain – Sales Reps and Distributors 196
7.17.10 Soulbrain -TECHCET Analyst Assessment 196
7.18. Strem 197
7.18.1 Strem – Company Overview 197
7.18.2 Strem – Products 197
7.18.3 Strem – News 198
7.18.4 Strem -Regions Served 199
7.18.5 Strem -Key Customers 199
7.18.6 Strem – Financial Overview 199
7.18.7 Strem – Manufacturing Locations, Capabilities, and Certifications 199
7.18.8 Strem -JVs and Partnerships 200
7.18.9 Strem -Sales Reps 200
7.18.10 Strem -TECHCET Analyst Assessment 200
7.19. Tanaka Kikinzoku Group 201
7.19.1 Tanaka Kikinzoku Group – Company Overview 201
7.19.2 Tanaka Kikinzoku Group -Business Segments 201
7.19.3 Tanaka Kikinzoku Group – News 202
7.19.4 Tanaka Kikinzoku Group – Regions Served 203
7.19.5 Tanaka Kikinzoku Group – Key Customers 203
7.19.6 Tanaka Holdings – Fiscal Year Financial Overview 203
7.19.7 Tanaka Kikinzoku Group – Manufacturing Locations, Capabilities, and Certifications 204
7.19.8 Tanaka Kikinzoku Group – JVs and Partnerships 205
7.19.9 Tanaka Kikinzoku Group – Sales Reps and Distributors 205
7.19.10 Tanaka Kikinzoku Group – TECHCET Analyst Assessment 206
7.20. Tokyo Chemical Industry Co., Ltd. 206
7.20.1 TCI – Company Overview 206
7.20.2 TCI-Business Segments 207
7.20.3 TCI- News 207
7.20.4 TCI – Regions Served 208
7.20.5 TCI- Fiscal Year Financial Overview 208
7.20.6 TCI- Manufacturing Locations, Capabilities, and Certifications 208
7.20.7 TCI-JVs and Partnerships 208
7.20.8 TCI-Sales Reps and Distributors 209
7.20.9 TCI-TECHCET Analyst Assessment 209
7.21. Tri Chemical Laboratories 209
7.21.1 Tri Chemical Laboratories Inc.- Company Overview 209
7.21.2 Tri Chemical Laboratories Inc.-Business Segments 209
7.21.3 Tri Chemical Laboratories Inc.- News 211
7.21.4 Tri Chemical Laboratories Inc. – Regions Served 211
7.21.5 Tri Chemical Laboratories Inc.- Key Customers 211
7.21.6 Tri Chemical Laboratories Inc.- Financial Overview 211
7.21.7 Tri Chemical Laboratories Inc.- Manufacturing Locations, Capabilities, and Certifications 211
7.21.8 Tri Chemical Laboratories Inc.- JVs and Partnerships 212
7.21.9 Tri Chemical Laboratories Inc. – Sales Reps and Distributors 212
7.21.10 Tri Chemical Laboratories Inc. – TECHCET Analyst Assessment 212
7.22. Umicore 213
7.22.1 Umicore – Company Overview 213
7.22.2 Umicore – Business Segments 213
7.22.3 Umicore – News 214
7.22.4 Umicore – Regions Served 215
7.22.5 Umicore – Key Customers 215
7.22.6 Umicore – Financial Overview 216
7.22.7 Umicore – JVs and Partnerships 218
7.22.8 Umicore – Sales Reps 218
7.22.9 Umicore – TECHCET Analyst Assessment 218
7.23. UP Chemical/ Yoke (China HQ) 219
7.23.1 UP Chemical- Company Overview 219
7.23.2 UP Chemical- Business Segments 219
7.23.3 UP Chemical- News 220
7.23.4 UP Chemical – Key Customers 220
7.23.5 UP Chemical- Regions Served 220
7.23.6 UP Chemical- Manufacturing Locations, Capabilities, and Certifications 220
7.23.7 UP Chemical- JVs and Partnerships 221
7.23.8 UP Chemical- Client/Partners 222
7.23.9 UP Chemical- Sales Reps and Distributors 222
7.23.10 UP Chemical- TECHCET Analyst Assessment 223
7.24. VERSUM (Maker, Purifier, Supplier) – OLD Profile, now MERCK 223
7.24.1 Versum – Company Overview 223
7.24.2 VERSUM – Business Segments 224
7.24.3 VERSUM- Financial Overview 224
7.24.4 VERSUM – News 225
7.24.5 VERSUM- Manufacturing Locations, Capabilities, and Certifications 226
7.24.6 VERSUM- JVs and Partnerships 226
7.24.7 VERSUM- Sales Reps and Distributors 226
7.24.8 VERSUM- TECHCET Analyst Assessment 227
7.25. Wonik Materials Co. Ltd. 228
7.25.1 Wonik Materials – Company Overview 228
7.25.2 Wonik Materials – Business Segments 228
7.25.3 Wonik Materials – News 231
7.25.4 Wonik Materials – Regions Served 232
7.25.5 Wonik Materials – Key Customers 232
7.25.6 Wonik Materials – Financial Overview 232
7.25.7 Wonik Materials – Manufacturing Locations, Capabilities, and Certifications 233
7.25.8 Wonik Materials – JVs and Partnerships 235
7.25.9 Wonik Materials – Sales Reps and Distributors 235
7.25.10 Wonik Materials – TECHCET Analyst Assessment 235
7.26. Zillion Tek Co., Ltd 236
7.26.1 Zillion Tek – Company Overview 236
7.26.2 Zillion Tek -Business Segments 236
7.26.3 Zillion Tek – News 238
7.26.4 Zillion Tek – Regions Served 239
7.26.5 Zillion Tek – Key Customers 239
7.26.6 Zillion Tek – Financial Overview 239
7.26.7 Zillion Tek – Manufacturing Locations, Capabilities, and Certifications 239
7.26.8 Zillion Tek – Sales Reps and Distributors 240
7.26.9 Zillion Tek – TECHCET Analyst Assessment 240

8. APENDIX 1- FUNDAMENTALS OF THIN FILM DEPOSITION BY CVD, ALD, AND SOD, AND ASD AND ALE 241

8.1 Chemical Vapor Deposition – CVD 242
8.2 Atomic Layer Deposition – ALD 244
8.3 Spin-on Dielectrics (SOD) 246
8.4 Atomic Layer Etching (ALE) 246
8.5 Area Selective Deposition (ASD) 248

9. APPENDIX 2 LOGIC AND MEMORY TECHNOLOGIES AND ROADMAPS 250

9.1.1 Multi-patterning & EUV Lithography 250
9.1.2 Interconnect Trends 260
9.1.2.1 Copper Interconnect 261
9.1.2.2 Cobalt interconnects, liners, and caps 262
9.1.2.3 Ruthenium Interconnects 267
9.1.2.4 High-aspect-ratio ruthenium power rails 268
9.1.2.5 Manganese Barrier Metal 271
9.1.3 Logic Transistor Evolution 271
9.1.3.1 5 nm and beyond 277
9.1.3.2 Extending FinFET to Horizontal Nanowires GAA FETs 278
9.1.3.3 Realizing vertical Logic – Going vertical (2.5/3D) 283
9.1.4 Memory Evolution & Future Trends 286
9.1.4.1 DRAM 287
9.1.4.2 2D to 3DNAND transition 293
9.1.4.3 Alternative NVM Technologies 296
9.1.4.3.1 3D XPoint 296
9.1.4.3.2 Ferroelectric FRAM and FeFET 297
9.1.4.3.3 Emerging Negative Capacitance Devices: 299

10. APPENDIX 3 – ACRONYMS 302


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